[图书][B] RF-MEMS Technology for High-Performance Passives: The challenge of 5G mobile applications
J Iannacci - 2017 - iopscience.iop.org
Commencing with a review of the characteristics of RF-MEMS in relation to 5G, the book
proceeds to develop practical insight concerning the design and development of RF-MEMS …
proceeds to develop practical insight concerning the design and development of RF-MEMS …
[PDF][PDF] Introduction to MEMS and RF-MEMS: From the early days of microsystems to modern RF-MEMS passives
J Iannacci - Rf-Mems Technology for High-Performance Passives; …, 2017 - researchgate.net
Thinking of electronics and wondering about the intricacy of paths through which it has
modified our habits, expectations and way of living in the last few decades, linking the …
modified our habits, expectations and way of living in the last few decades, linking the …
A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonators
J Zhao, Q Yuan, X Kan, J Yang… - … of Micromechanics and …, 2016 - iopscience.iop.org
This paper presents a wafer-level three-dimensional (3D) vacuum packaging technique for
radio frequency microelectromechanical systems (RF MEMS) resonators. A Sn-rich Au–Sn …
radio frequency microelectromechanical systems (RF MEMS) resonators. A Sn-rich Au–Sn …
A novel multiple-frequency RF-MEMS resonator based on the whispering gallery modes
X Kan, Z Chen, Q Yuan, F Wang… - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
A novel microelectromechanical system (MEMS) disk resonator based on the whispering
gallery modes (WGMs) has been demonstrated. With the optimized structure of the multi …
gallery modes (WGMs) has been demonstrated. With the optimized structure of the multi …
Dominant loss mechanisms of whispering gallery mode RF-MEMS resonators with wide frequency coverage
Z Chen, Q Jia, W Liu, Q Yuan, Y Zhu, J Yang, F Yang - Sensors, 2020 - mdpi.com
This work investigates the dominant energy dissipations of the multi-frequency whispering
gallery mode (WGM) resonators to provide an insight into the loss mechanisms of the …
gallery mode (WGM) resonators to provide an insight into the loss mechanisms of the …
Experimental Verification of Coupling Strength on the Mode-Localization in Single MEMS DETF Resonators and Its Application as a Force Sensor
This article presents an experimental verification of the mode-localization effect between the
two tines of a single double-ended tuning fork (DETF) microelectromechanical systems …
two tines of a single double-ended tuning fork (DETF) microelectromechanical systems …
[图书][B] RF-MEMS Technology for High-Performance Passives: 5G applications and prospects for 6G
J Iannacci - 2022 - iopscience.iop.org
The focus of this book develops around hardware, and in particular on low-complexity
components for Radio Frequency (RF) applications. To this end, microsystem (MEMS) …
components for Radio Frequency (RF) applications. To this end, microsystem (MEMS) …
3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity
Z Chen, F Wang, Q Yuan, X Kan, J Yang, J Zhao… - Sensors and Actuators A …, 2019 - Elsevier
Frequency stability of 3D encapsulated VHF MEMS resonators with Q factor of 10,000 is
systematically studied. The long-term frequency stability results of the resonance frequency …
systematically studied. The long-term frequency stability results of the resonance frequency …
A Novel High Q Lamé-Mode Bulk Resonator with Low Bias Voltage
T Wang, Z Chen, Q Jia, Q Yuan, J Yang, F Yang - Micromachines, 2020 - mdpi.com
This work reports a novel silicon on insulator (SOI)-based high quality factor (Q factor) Lamé-
mode bulk resonator which can be driven into vibration by a bias voltage as low as 3 V. A …
mode bulk resonator which can be driven into vibration by a bias voltage as low as 3 V. A …
Micromachined high-performance RF passives in CMOS substrate
This review systematically addresses the micromachining technologies used for the
fabrication of high-performance radio-frequency (RF) passives that can be integrated into …
fabrication of high-performance radio-frequency (RF) passives that can be integrated into …