Commencing with a review of the characteristics of RF-MEMS in relation to 5G, the book
proceeds to develop practical insight concerning the design and development of RF-MEMS …

Thinking of electronics and wondering about the intricacy of paths through which it has
modified our habits, expectations and way of living in the last few decades, linking the …

This paper presents a wafer-level three-dimensional (3D) vacuum packaging technique for
radio frequency microelectromechanical systems (RF MEMS) resonators. A Sn-rich Au–Sn …

A novel microelectromechanical system (MEMS) disk resonator based on the whispering
gallery modes (WGMs) has been demonstrated. With the optimized structure of the multi …

This work investigates the dominant energy dissipations of the multi-frequency whispering
gallery mode (WGM) resonators to provide an insight into the loss mechanisms of the …

This article presents an experimental verification of the mode-localization effect between the
two tines of a single double-ended tuning fork (DETF) microelectromechanical systems …

The focus of this book develops around hardware, and in particular on low-complexity
components for Radio Frequency (RF) applications. To this end, microsystem (MEMS) …

Frequency stability of 3D encapsulated VHF MEMS resonators with Q factor of 10,000 is
systematically studied. The long-term frequency stability results of the resonance frequency …

This work reports a novel silicon on insulator (SOI)-based high quality factor (Q factor) Lamé-
mode bulk resonator which can be driven into vibration by a bias voltage as low as 3 V. A …

This review systematically addresses the micromachining technologies used for the
fabrication of high-performance radio-frequency (RF) passives that can be integrated into …