Nanophotonics holds great promise for integrated quantum technologies, but realizing all
functionalities for processing quantum states of light in optical waveguides poses an …

Exploring optimal recipes to reduce dimensional variations is critical in etching processes.
Variations in critical dimensions that were acceptable previously can become problematic …

Typical applications of integrated photonics in the mid-infrared (MIR) are different from near-
infrared (telecom) range and, in many instances, they involve chemical sensing through MIR …

Potassium hydroxide (KOH) wet etching is widely used in realizing microelectromechanical
systems (MEMS) diaphragm due to its low cost, safe and easy handling. However, a variety …

利用射频磁控溅射法制备了掺铒Ga2O3 薄膜, 研究了不同氧化铒靶溅射功率和不同退火温度下
薄膜的发光特性, 发现在氧化铒靶溅射功率为40 W 以及退火温度达到600℃ …

Reducing variations of fabrication processes is a primary focus for improvement in etching
process. One powerful tool employed towards this goal is Advanced Process Control (APC) …

The laser-induced damage and laser-induced contamination are phenomena limiting
reliable operation of coating-based optical components in ultrashort pulse high-power …

Titanium metal and its alloy components find extensive applications in various industries
such as aerospace, medicine and automotive due to its light weight-strength ratio. More …