A review of computer microvision-based precision motion measurement: Principles, characteristics, and applications

S Yao, H Li, S Pang, B Zhu, X Zhang… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
Microengineering/nanoengineering is an emerging field that enables engineering and
scientific discoveries in the microworld. As an effective and powerful tool for automation and …

A survey on the grating based optical position encoder

H Yu, X Chen, C Liu, G Cai, W Wang - Optics & Laser Technology, 2021 - Elsevier
Optical position encoders have been invented and investigated for several decades for
precision measurement. In this article, a comprehensive survey on the optical position …

High-efficiency sub-microscale uncertainty measurement method using pattern recognition

C Zhao, CF Cheung, P Xu - ISA transactions, 2020 - Elsevier
This study presents a fast precision measurement method that uses pattern recognition.
First, a specific micro-structured surface was designed and manufactured, providing a …

Sensing one nanometer over ten centimeters: A microencoded target for visual in-plane position measurement

AN André, P Sandoz, B Mauzé… - IEEE/ASME …, 2020 - ieeexplore.ieee.org
At the nanoscale, accurate control and position sensing are recurrent issues conditioning
advances of technologies and instruments in diverse fields of application. Recent advances …

Nanometer precision with a planar parallel continuum robot

B Mauzé, R Dahmouche, GJ Laurent… - IEEE Robotics and …, 2020 - ieeexplore.ieee.org
In many cases, soft and continuum robots represent an interesting alternative to articulated
robots because they have the advantages of miniaturization capability, safer interactions …

Realtime in-plane displacements tracking of the precision positioning stage based on computer micro-vision

H Li, B Zhu, Z Chen, X Zhang - Mechanical Systems and Signal Processing, 2019 - Elsevier
This study presents a micro-vision-based measurement method for realtime and high
accuracy in-plane displacements tracking of the precision positioning stage. In this method …

Pose sensing and servo control of the compliant nanopositioners based on microscopic vision

H Li, B Zhu, X Zhang, J Wei… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
This article presents new pose sensing and servo control techniques for the compliant
nanopositioners (CNPs) based on optical microscopic vision. A visual pose tracking …

The approach of nanoscale vision-based measurement via diamond-machined surface topography

H Li, X Fang, Z Zhu, W Fu, C Zhao - Measurement, 2023 - Elsevier
Micro-vision positioning measurement combines optical microscopy and computer vision to
achieve noncontact, high-precision positioning measurement. Ultra-precision machined …

A novel 3D reconstruction method with a binocular-line laser system

Y Chen, W Jiang, Z Luo, L Yang - Measurement, 2024 - Elsevier
The accuracy of 3D reconstruction will be reduced due to sensor occlusion or tracking failure
when it comes to complex structural measurement. To overcome this problem, a novel 3D …

Closed-Loop Optical Tracking of a Micro-Conveyor over a Smart Surface

S Malak, HA Hajjar, E Dupont, MU Khan… - Journal of Sensor and …, 2024 - mdpi.com
In this work, a closed loop control system is developed to optically localize and track micro-
robots with high precision. These micro-robots (ie, micro-conveyors) are in motion …