Embodiments of the invention relate generally to an ultravio let (UV) cure chamber for curing
a dielectric material dis posed on a Substrate and to methods of curing dielectric materials …

Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing
a dielectric material disposed on a substrate and to methods of curing dielectric materials …

4,054,389 A* 10/1977 Owen......................... 356,419 4,149,805. A* 4, 1979 Chew,
III.................... 356,416 4,269,481 A* 5/1981 Yeh et al..................... 359,259 4.508, 964 A …

(57) ABSTRACT A biological and chemical detection system is provided that detects and
identifies biological and/or chemical particulates of interest. The biological and chemical …

A particle detector has a sample area of cross section no in excess of about 2 mm for
containing environmental fluid, a light source on one side of the sample area for directing a …

The present invention contemplates methods, apparatuses, and systems for detecting,
classifying and identifying air borne biological and non-biological particulates, in near real …

(57) ABSTRACT A pathogen detector has a sample area for containing environmental air, a
light source on one side of the sample area for directing a collimated beam of light through …

The system includes an excitation source for providing a beam of electromagnetic radiation
having a source wavelength. A first wavelength selective device is positioned to be …

An ultraviolet (UV) cure chamber enables curing a dielectric material disposed on a
substrate and in situ cleaning thereof. A tandem process chamber provides two separate …

Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing
a dielectric material disposed on a substrate and to methods of curing dielectric materials …