An efficient approach for atomic-scale polishing of single-crystal silicon via plasma-based atom-selective etching

Z Fang, Y Zhang, R Li, Y Liang, H Deng - International Journal of Machine …, 2020 - Elsevier
To realize the damage-free, highly efficient, and atomic-level polishing of single-crystal Si,
plasma-based atom-selective etching (PASE) is proposed in this study as a generic …

Inductively coupled plasma-mass spectrometry: insights through computer modeling

A Bogaerts, M Aghaei - Journal of Analytical Atomic Spectrometry, 2017 - pubs.rsc.org
In this tutorial review paper, we illustrate how computer modeling can contribute to a better
insight in inductively coupled plasma-mass spectrometry (ICP-MS). We start with a brief …

The role of transport phenomena and modeling in the development of thermal plasma technology

MI Boulos - Plasma Chemistry and Plasma Processing, 2016 - Springer
A brief overview is presented of the principal areas where thermal plasmas had a significant
technological impact over the past century. This is followed by an analysis of the specific role …

Ion beam, focused ion beam, and plasma discharge machining

DM Allen, P Shore, RW Evans, C Fanara, W O'Brien… - CIRP annals, 2009 - Elsevier
Non-conventional methods of machining are used for many engineering applications where
the traditional processes fail to be cost-effective. Such processes include Ion Beam …

Mathematical models for eddy currents and magnetostatics

R Touzani, J Rappaz - Mathematical Models for Eddy Currents and …, 2014 - Springer
Eddy current processes consist in generating currents in electrically conducting material by
means of time dependent magnetic fields. The term 'eddy'originates from the fact that these …

A two-dimensional nodal model with turbulent effects for the synthesis of Si nano-particles by inductively coupled thermal plasmas

V Colombo, E Ghedini, M Gherardi… - Plasma Sources …, 2012 - iopscience.iop.org
Nano-particle synthesis by means of inductively coupled plasma torches is a material
process of large technological interest. Numerous parameters are involved in the …

Numerical modeling of an inductively coupled plasma torch using OpenFOAM

C Busse, I Tsivilskiy, J Hildebrand, JP Bergmann - Computers & Fluids, 2021 - Elsevier
A customized code using the free and fully open-source CFD software package OpenFOAM
was developed to simulate a two-dimensional axisymmetric model of an inductively coupled …

Analysis of De-Laval nozzle designs employed for plasma figuring of surfaces

N Yu, R Jourdain, M Gourma, P Shore - The international journal of …, 2016 - Springer
Plasma figuring is a dwell time fabrication process that uses a locally delivered chemical
reaction through means of an inductively coupled plasma (ICP) torch to correct surface …

Study on behaviors of tungsten powders in radio frequency thermal plasma

H Zhu, H Tong, C Cheng, N Liu - … Journal of Refractory Metals and Hard …, 2017 - Elsevier
This paper describes an investigational study of the spheroidization of refractory metal
tungsten powders by radio frequency thermal plasma, with emphasis on the melting …

A three-dimensional investigation of the effects of excitation frequency and sheath gas mixing in an atmospheric-pressure inductively coupled plasma system

V Colombo, E Ghedini… - Journal of Physics D …, 2010 - iopscience.iop.org
A three-dimensional numerical model for the simulation of the behaviour of a commercial
inductively coupled plasma torch with non-axisymmetric reaction chamber has been …