We present a compact heterodyne laser interferometer developed for high-sensitivity
displacement sensing applications. This interferometer consists of customized prisms and …

In this research paper, a precision position-measurement system based on the image
grating technique is presented. The system offers a better robustness and flexibility for 1D …

In this paper, a modification method based on a U-Net convolutional neural network is
proposed for the precise fabrication of three-dimensional microstructures using laser direct …

This Note presents a new absolute XY-Θ position sensor for measuring planar motion of a
precision multi-axis stage system. By analyzing the rotated image of a two-dimensional …

A multi-axis position sensor using a 2-D color-coded binary scale (CCBS) is proposed for
measuring absolute 2-D planar position and orientation in a full angle range. Since a color …

Controlling an accuracy of fabricating computer-generated holograms (CGH) is actual task.
Such holograms are usually used for generating reference wavefront for interferometric …

The development and research of new devices and systems of diffractive and integrated
optics, which based on elements with thin-layer micro-and nanostructures, requires the …

Motorized stages are widely used in the fields of processing and measurement, such as
lithography, semiconductor packaging, biochips, and micro/nanostructure characterization …

Анотація The thesis contains 95 pages, of them 75–the main text, 45 figures, and 8 tables.
The main purpose of the project is to develop an automatic focus control system for the direct …

GALEANO, July A. et al. Microfabrication of position reference patterns onto glass
microscope slides for high-accurate analysis of dynamic cellular events. TecnoL.[online] …