Wideband and low-loss surface acoustic wave filter based on 15° YX-LiNbO₃/SiO₂/Si structure
R Su, J Shen, Z Lu, H Xu, Q Niu, Z Xu… - IEEE electron device …, 2021 - ieeexplore.ieee.org
With the development of the radio frequency technique, the explosive growth of transmitted
data in 5G era puts higher requirements on surface acoustic wave (SAW) filter bandwidth. In …
data in 5G era puts higher requirements on surface acoustic wave (SAW) filter bandwidth. In …
Deep-ultraviolet integrated photonic and optoelectronic devices: A prospect of the hybridization of group III–nitrides, III–oxides, and two-dimensional materials
Progress in the design and fabrication of ultraviolet and deep-ultraviolet group III–nitride
optoelectronic devices, based on aluminum gallium nitride and boron nitride and their …
optoelectronic devices, based on aluminum gallium nitride and boron nitride and their …
Interdigital transducers on a piezoelectric thin-film for signal compression
A piezoelectric thin-film suspended above a carrier substrate. An input interdigital transducer
(IDT) having first interdigitated electrodes is disposed at different locations along the …
(IDT) having first interdigitated electrodes is disposed at different locations along the …
Scandium-doped aluminum nitride for acoustic wave resonators, filters, and ferroelectric memory applications
Scandium-doped aluminum nitride (AlScN) has generated great research interest owing to
its unique properties. The wurtzite-structure AlScN is compatible with the complementary …
its unique properties. The wurtzite-structure AlScN is compatible with the complementary …
Wideband surface acoustic wave filter at 3.7 GHz with spurious mode mitigation
R Su, S Fu, J Shen, Z Lu, H Xu, R Wang… - IEEE Transactions …, 2022 - ieeexplore.ieee.org
As an essential functional block in radio frequency (RF) front-ends, surface acoustic wave
(SAW) filters with large fractional bandwidth (FBW), high center frequency (), and low loss …
(SAW) filters with large fractional bandwidth (FBW), high center frequency (), and low loss …
Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators
This paper reports on the design, fabrication, and characterization of mode X-cut Lithium
Niobate Laterally Vibrating Resonators (LVRs) operating between 100 MHz and 1 GHz. In …
Niobate Laterally Vibrating Resonators (LVRs) operating between 100 MHz and 1 GHz. In …
High-figure-of-merit X-cut lithium niobate MEMS resonators operating around 50 MHz for large passive voltage amplification in radio frequency applications
This article reports on the modeling, design, fabrication, and testing of high-performance X-
cut lithium niobate (LN) laterally vibrating resonators (LVRs) operating around 50 MHz. The …
cut lithium niobate (LN) laterally vibrating resonators (LVRs) operating around 50 MHz. The …
Ultralow quiescent power‐consumption wake‐up technology based on the bionic triboelectric nanogenerator
Wake‐up circuits in smart microsystems make huge contributions to energy conservation of
electronic networks in unmanned areas, which still require higher pressure‐triggering …
electronic networks in unmanned areas, which still require higher pressure‐triggering …
Aluminum nitride combined overtone resonators for the 5G high frequency bands
G Chen, M Rinaldi - Journal of Microelectromechanical …, 2020 - ieeexplore.ieee.org
This work presents a new acoustic MEMS resonator technology, dubbed Aluminum Nitride
(AlN) Combined Overtone Resonator (COR), capable of addressing the filter requirements …
(AlN) Combined Overtone Resonator (COR), capable of addressing the filter requirements …
ScAlN-based LCAT mode resonators above 2 GHz with high FOM and reduced fabrication complexity
This letter reports the first implementation of a new class of laterally coupled alternating
thickness (LCAT) mode resonators operating above 2 GHz, realised by replacing the bottom …
thickness (LCAT) mode resonators operating above 2 GHz, realised by replacing the bottom …