Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates

B Sajadi, F Alijani, H Goosen, F van Keulen - Nonlinear Dynamics, 2018 - Springer
Abstract Characterization of nonlinear behavior of micro-mechanical components in MEMS
applications plays an important role in their design process. In this paper, nonlinear …

Investigation of an electrostatically actuated imperfect circular microplate under transverse pressure for pressure sensor applications

M Das, A Bhushan - Engineering Research Express, 2021 - iopscience.iop.org
In this paper, we present static and dynamic analysis of an electrostatically actuated
imperfect circular microplate under transverse pressure. In modelling of the microplate, we …

Application and optimization of stiffness abruption structures for pressure sensors with high sensitivity and anti-overload ability

T Xu, D Lu, L Zhao, Z Jiang, H Wang, X Guo, Z Li… - Sensors, 2017 - mdpi.com
The influence of diaphragm bending stiffness distribution on the stress concentration
characteristics of a pressure sensing chip had been analyzed and discussed systematically …

Nano-resonator frequency response based on strain gradient theory

EM Miandoab, A Yousefi-Koma… - Journal of Physics D …, 2014 - iopscience.iop.org
This paper aims to explore the dynamic behaviour of a nano-resonator under ac and dc
excitation using strain gradient theory. To achieve this goal, the partial differential equation …

Resonance frequency analysis of a dual-frequency capacitive micromechanical ultrasonic transducer for detecting high and low pressures simultaneously with high …

X Zhang, L Yu, Q Guo, D Li, H Zhang… - Journal of Physics D …, 2019 - iopscience.iop.org
A novel design of a dual-frequency capacitive micromechanical ultrasonic transducer
(CMUT) that is capable of detecting two pressure ranges is proposed in this paper. The …

Global dynamics and integrity of a micro-plate pressure sensor

P Belardinelli, B Sajadi, S Lenci, F Alijani - Communications in Nonlinear …, 2019 - Elsevier
This paper investigates the complex bifurcation scenario of electrically-actuated circular
micro-plates subjected to differential pressure. Our analysis deals with the primary …

Natural frequencies and modes of electrostatically actuated curved bell-shaped microplates

A Asher, R Gilat, S Krylov - Applied Sciences, 2022 - mdpi.com
Configuration-dependent spectral behavior of initially curved circular microplates loaded by
a distributed nonlinear electrostatic force is investigated. The structures under consideration …

A mechanism of tunable frequency splitting in electrostatically actuated circular plates

M Das, A Bhushan - Proceedings of the Institution of …, 2023 - journals.sagepub.com
In this paper, we address a new mechanism of frequency splitting of vibration modes in
electrostatically actuated perfectly flat submicron circular nanoplates. The splitting is …

[HTML][HTML] An Investigation into High-Accuracy and Energy-Efficient Novel Capacitive MEMS for Tire Pressure Sensor Application

L Luo, Z Wang, J Chen, AG Hui, AM Rogikin, R Liu… - Sensors, 2024 - mdpi.com
Tire pressure monitoring systems (TPMSs) are essential for maintaining driving safety by
continuously monitoring critical tire parameters, such as pressure and temperature, in real …

Investigation of New Accelerometer Based on Capacitive Micromachined Ultrasonic Transducer (CMUT) with Ring-Perforation Membrane

L Gou, H Wang, Q Ding, Y Liu, R Yang, F Zhang… - Micromachines, 2024 - mdpi.com
Capacitive micromachined ultrasonic transducer (CMUT) has been widely studied due to its
excellent resonance characteristics and array integration. This paper presents the first study …