[HTML][HTML] Thermal-performance instability in piezoresistive sensors: Inducement and improvement
Y Liu, H Wang, W Zhao, H Qin, X Fang - Sensors, 2016 - mdpi.com
The field of piezoresistive sensors has been undergoing a significant revolution in terms of
design methodology, material technology and micromachining process. However, the …
design methodology, material technology and micromachining process. However, the …
[HTML][HTML] Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the
development of next-generation mobile, wearable and implantable devices. However, these …
development of next-generation mobile, wearable and implantable devices. However, these …
[HTML][HTML] Micro-scale realization of compliant mechanisms: Manufacturing processes and constituent materials—A review
Compliant micromechanisms (CMMs) acquire mobility from the deflection of elastic
members and have been proven to be robust by millions of silicon MEMS devices. However …
members and have been proven to be robust by millions of silicon MEMS devices. However …
[HTML][HTML] A two-stage amplified PZT sensor for monitoring lung and heart sounds in discharged pneumonia patients
H Chen, S Yu, H Liu, J Liu, Y Xiao, D Wu… - Microsystems & …, 2021 - nature.com
Assessment of lung and heart states is of critical importance for patients with pneumonia. In
this study, we present a small-sized and ultrasensitive accelerometer for continuous …
this study, we present a small-sized and ultrasensitive accelerometer for continuous …
High-stability quartz resonant accelerometer with micro-leverages
C Han, C Li, Y Zhao, B Li - Journal of Microelectromechanical …, 2021 - ieeexplore.ieee.org
This study proposes a highly stable differential resonant accelerometer that is monolithically
micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of …
micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of …
High-sensitivity MEMS force and acceleration sensor based on graphene-induced non-radiative transition
G Li, F Liu, S Yang, JT Liu, W Li, Z Wu - Carbon, 2023 - Elsevier
The micro-electromechanical-system (MEMS) force and acceleration sensor, based on the
graphene-induced non-radiative transition, was investigated using analytical solution and …
graphene-induced non-radiative transition, was investigated using analytical solution and …
A wideband vibration energy harvester based on a folded asymmetric gapped cantilever
Y Hu, Y Xu - Applied physics letters, 2014 - pubs.aip.org
This paper reports a wideband multi-mass multi-spring piezoelectric vibration energy
harvester (VEH) based on a folded asymmetric gapped cantilever, which enables multiple …
harvester (VEH) based on a folded asymmetric gapped cantilever, which enables multiple …
[HTML][HTML] Out-of-plane dual flexure MEMS piezoresistive accelerometer with low cross axis sensitivity
K Hari, SK Verma, IR Praveen Krishna… - Microsystem Technologies, 2018 - Springer
Accelerometers are one of the widely explored microsensors with many transduction
mechanisms. One of the primary concerns with piezoresistive microaccelerometers is their …
mechanisms. One of the primary concerns with piezoresistive microaccelerometers is their …
Detecting subtle vibrations using graphene-based cellular elastomers
Ultralight graphene elastomer-based flexible sensors are developed to detect subtle
vibrations within a broad frequency range. The same device can be employed as an …
vibrations within a broad frequency range. The same device can be employed as an …
A high precision SOI MEMS–CMOS±4g piezoresistive accelerometer
AL Roy, H Sarkar, A Dutta, TK Bhattacharyya - Sensors and Actuators A …, 2014 - Elsevier
Abstract System development and characterization of a low noise low offset SOI MEMS–
CMOS PCB-integrated multi-chip±4g piezoresistive accelerometer sensor comprising a …
CMOS PCB-integrated multi-chip±4g piezoresistive accelerometer sensor comprising a …