The field of piezoresistive sensors has been undergoing a significant revolution in terms of
design methodology, material technology and micromachining process. However, the …

Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the
development of next-generation mobile, wearable and implantable devices. However, these …

Compliant micromechanisms (CMMs) acquire mobility from the deflection of elastic
members and have been proven to be robust by millions of silicon MEMS devices. However …

Assessment of lung and heart states is of critical importance for patients with pneumonia. In
this study, we present a small-sized and ultrasensitive accelerometer for continuous …

This study proposes a highly stable differential resonant accelerometer that is monolithically
micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of …

The micro-electromechanical-system (MEMS) force and acceleration sensor, based on the
graphene-induced non-radiative transition, was investigated using analytical solution and …

This paper reports a wideband multi-mass multi-spring piezoelectric vibration energy
harvester (VEH) based on a folded asymmetric gapped cantilever, which enables multiple …

Accelerometers are one of the widely explored microsensors with many transduction
mechanisms. One of the primary concerns with piezoresistive microaccelerometers is their …

Ultralight graphene elastomer-based flexible sensors are developed to detect subtle
vibrations within a broad frequency range. The same device can be employed as an …

Abstract System development and characterization of a low noise low offset SOI MEMS–
CMOS PCB-integrated multi-chip±4g piezoresistive accelerometer sensor comprising a …