Laminated body and method of manufacturing laminated body
T Shunya, N Okada, Y Takimoto… - US Patent App. 17 …, 2022 - Google Patents
A laminated body includes a transparent substrate having a laminated film. The laminated
film includes a dielectric layer containing silicon nitride, a barrier layer composed of a single …
film includes a dielectric layer containing silicon nitride, a barrier layer composed of a single …