A four‐grid electrostatic energy analyzer for measurements of the ion velocity distribution
and the emission of secondary electrons on the electrodes of low‐pressure radio frequency …

The known properties of nitrogen as an impurity in, and as an alloy element of, the
germanium network are reviewed in this article. Amorphous and crystalline germanium …

A symmetric capacitively coupled SiH 4 radio-frequency discharge at 13.56 MHz is analysed
by spatially resolved optical emission spectroscopy and by measurements of the RF voltage …

Among the many available real-time characterization methods, ellipsometry stands out with
the combination of high sensitivity and high speed as well as nondestructive, spectroscopic …

II. Phase Modulated Ellipsometry (PME) II. 1. Optical characterizations using polarized light
II. 2. Phase Modulated Ellipsometry: Optical formalism II. 2.1. First Order Approximation II …

The root mean square (rms) surface roughness was determined utilizing the technique
developed by Cunningham and Braundmeier. 17 A thin layer (< 1500 A> of silver was …

The effect of microscopic roughness on the complex normal-incidence reflectance r̃ at an
interface between a transparent ambient and a microscopically rough substrate is treated …

We present an interpretation of the pressure and temperature dependence of the growth
kinetics of hydrogenated amorphous silicon (a-Si: H) in SiH 4 and Si 2 H 6 rf-glow …

In situ fast kinetic ellipsometry is used to investigate the early stage of the growth of
hydrogenated amorphous silicon (a-Si: H) on tin-doped indium oxide (ITO), tin oxide (TO) …

For a lab-on-chip application, we fabricate a blue bottom emitting strong microcavity organic
light emitting diode (OLED), using very smooth and optically thin (25 nm) silver film as anode …