Nanophotonic waveguides are at the core of a great variety of optical sensors. These
structures confine light along defined paths on photonic chips and provide light–matter …

On-chip devices for absorption spectroscopy and Raman spectroscopy have been
developing rapidly in the last few years, triggered by the growing availability of compact and …

In this article, we provide a review of fabrication platforms and state of the art developments
in the area of silicon nitride photonic integrated circuits (PICs) for the visible wavelength …

Confinement of silicon nanoparticles in silicon nitride instead of an oxide matrix might
materially facilitate its potential applications as a light-emitting component in optoelectronics …

Silicon nitride (SiN x) thin films have attracted interest as an important material for use in
next-generation devices such as a gate spacer in 3D fin field-effect transistors (finFETs) …

Chemical vapor deposition (CVD) is a technique for the fabrication of thin films of polymeric
materials, which has successfully overcome some of the issues faced by wet chemical …

In this article the current methodologies for low-temperature thin film deposition in
microelectronics are reviewed. The paper discusses the high temperature processes in …

Covalently attached organic monolayers on etched silicon nitride (Si x N4; x≥ 3) surfaces
were prepared by reaction of Si x N4-coated wafers with neat or solutions of 1-alkenes and 1 …

The ongoing demands for increased storage capacity flash memory in 2D-NAND structures
resulted in their replacement by more advanced 3D-NAND structures, with the memory cells …

Nanocomposite materials as a special class of nanostructured materials have recently
attracted great interest due to their extraordinary mechanical properties as well as thermal …