CMP processing of high mobility channel materials: Alternatives to Si
P Ong, L Teugels - Advances in Chemical Mechanical Planarization (CMP …, 2016 - Elsevier
This chapter overviews chemical mechanical polishing (CMP) processes for the
implementation of high mobility materials in advanced complementary metal-oxide …
implementation of high mobility materials in advanced complementary metal-oxide …
[图书][B] Study of High-k Dielectrics and Their Interfaces on Semiconductors for Device Applications
SN Supardan - 2019 - search.proquest.com
This thesis has focused on two emerging applications of high-k dielectrics in Metal-Oxide-
Semiconductor Field Effect Transistors (MOSFETs) and in Metal-InsulatorSemiconductor …
Semiconductor Field Effect Transistors (MOSFETs) and in Metal-InsulatorSemiconductor …