MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

Mechatronics has evolved into a way of life in engineering practice, and indeed pervades
virtually every aspect of the modern world. As the synergistic integration of mechanical …

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical,
electronic, optical, and other components on a substrate to construct functional devices …

Research and development in microelectromechanical systems (MEMS) have made
remarkable progress since 1988, when an electrostatic micromotor the size of a human hair …

Mechatronics has evolved into a way of life in engineering practice, and it pervades virtually
every aspect of the modern world. In chapters drawn from the bestselling and now standard …

Research and development in microelectromechanical systems (MEMS) have made
remarkable progress since the advent of the first electrostatic micromotor in 1987 …

This contribution focuses on the objectives of microsystems technology (MST). The reason
for this is two fold. First of all, it should explain what MST actually is. This question is often …

This work presents a systematic and comprehensive overview to the theory and applications
of mechatronic processes, emphasizing the adaptation and incorporation of this important …

A micro electrostatic wobble motor with toothed electrodes has been designed using a
newly proposed tooth profile, which we call the" composite profile". This new design results …

Many types of electrostatic and electromagnetic microactuators have been developed. It is
important to understand the fundamental performance limitations of these actuators for use …