A review of atomic force microscopy imaging systems: application to molecular metrology and biological sciences

N Jalili, K Laxminarayana - Mechatronics, 2004 - Elsevier
The atomic force microscope (AFM) system has evolved into a useful tool for direct
measurements of micro-structural parameters and unraveling the intermolecular forces at …

Focused ion beam processing for 3D chiral photonics nanostructures

M Manoccio, M Esposito, A Passaseo, M Cuscunà… - Micromachines, 2020 - mdpi.com
The focused ion beam (FIB) is a powerful piece of technology which has enabled scientific
and technological advances in the realization and study of micro-and nano-systems in many …

Nanoscale effects in focused ion beam processing

L Frey, C Lehrer, H Ryssel - Applied physics A, 2003 - Springer
Focused ion beams with diameters of 8 to 50 nm are used for material processing in the
nanoscale regime. In this paper, effects of the ion beam–solid interaction determining the …

Statistics of electrical breakdown field in HfO2 and SiO2 films from millimeter to nanometer length scales

C Sire, S Blonkowski, MJ Gordon, T Baron - Applied Physics Letters, 2007 - pubs.aip.org
The statistics of electrical breakdown field (E bd) of Hf O 2 and Si O 2 thin films has been
evaluated over multiple length scales using macroscopic testing of standardized metal-oxide …

Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

AP Malshe, KP Rajurkar, KR Virwani, CR Taylor… - CIRP annals, 2010 - Elsevier
Nanomanufactured products with higher complexities in function, materials, scales and their
integration demand an increasing need for advanced manufacturing tools. It is driven by …

C-AFM-based thickness determination of thin and ultra-thin SiO2 films by use of different conductive-coated probe tips

W Frammelsberger, G Benstetter, J Kiely… - Applied Surface Science, 2007 - Elsevier
The influence of the probe tip type on the electrical oxide thickness result was researched for
four differently coated conductive tip types using SiO2 (oxide) films with optical thickness of …

Focused ion beam milling of diamond: Effects of on yield, surface morphology and microstructure

DP Adams, MJ Vasile, TM Mayer… - Journal of Vacuum …, 2003 - pubs.aip.org
The effects of H 2 O vapor introduced during focused ion beam (FIB) milling of diamond
(100) are examined. In particular, we determine the yield, surface morphology, and …

Current-Limited Conductive Atomic Force Microscopy

J Weber, Y Yuan, S Pazos, F Kühnel… - … Applied Materials & …, 2023 - ACS Publications
Conductive atomic force microscopy (CAFM) has become the preferred tool of many
companies and academics to analyze the electronic properties of materials and devices at …

Nanotribology of carbon-based materials

DS Grierson, RW Carpick - Nano Today, 2007 - Elsevier
The dominance of surface effects at the nanoscale implies that nanotechnology applications
involving contacting, moving components can be critically limited by the tribological behavior …

Electrical characterization of stressed and broken down films at a nanometer scale using a conductive atomic force microscope

M Porti, M Nafrıa, X Aymerich, A Olbrich… - Journal of Applied …, 2002 - pubs.aip.org
A conductive atomic force microscope (C-AFM) has been used to investigate the
degradation and breakdown of ultrathin (< 6 nm) films of SiO 2 at a nanometric scale …