Device-optimization technique for robust and low-power FinFET SRAM design in nanoscale era

A Bansal, S Mukhopadhyay… - IEEE Transactions on …, 2007 - ieeexplore.ieee.org
In this paper, we propose a methodology to model and optimize FinFET devices for robust
and low-power SRAMs. We propose to optimize the gate sidewall offset spacer thickness to …

Impact of LER and random dopant fluctuations on FinFET matching performance

E Baravelli, M Jurczak, N Speciale… - IEEE transactions on …, 2008 - ieeexplore.ieee.org
Parameter variations pose an increasingly challenging threat to the CMOS technology
scaling. Among the sources of variability, line-edge-roughness (LER) and random dopant …

Atom-probe for FinFET dopant characterization

AK Kambham, J Mody, M Gilbert, S Koelling… - Ultramicroscopy, 2011 - Elsevier
With the continuous shrinking of transistors and advent of new transistor architectures to
keep in pace with Moore's law and ITRS goals, there is a rising interest in multigate 3D …

Effect of fin angle on electrical characteristics of nanoscale round-top-gate bulk FinFETs

Y Li, CH Hwang - IEEE transactions on electron devices, 2007 - ieeexplore.ieee.org
In this brief, electrical characteristics of 25-nm round-top-gate fin-typed field-effect transistors
(FinFETs) on silicon wafers are numerically explored. With an ideal fin angle (ie, thetas …

Caution: Abnormal variability due to terrestrial cosmic rays in scaled-down FinFETs

J Kim, JS Lee, JW Han… - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
The variability due to the displacement damage defect is investigated for various bulk
FinFET technology nodes. A random displacement damage from point to clustered defects is …

Machine learning approach for prediction of point defect effect in FinFET

J Kim, SJ Kim, JW Han… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
As Fin Field Effect Transistor (FinFET) scales aggressively, even a single point defect
becomes a source of performance variability. The point defect is inevitably introduced not …

Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

J Mody, R Duffy, P Eyben, J Goossens… - Journal of Vacuum …, 2010 - pubs.aip.org
With emerging three-dimensional device architectures for advanced silicon devices such as
fin field-effect-transistors (FinFETs), new metrology challenges are faced to characterize …

Front-end process modeling in silicon

L Pelaz, LA Marqués, M Aboy, P López… - The European Physical …, 2009 - Springer
Front-end processing mostly deals with technologies associated to junction formation in
semiconductor devices. Ion implantation and thermal anneal models are key to predict …

Analytical model of subthreshold current and threshold voltage for fully depleted double-gated junctionless transistor

ZM Lin, HC Lin, KM Liu, TY Huang - Japanese Journal of Applied …, 2012 - iopscience.iop.org
In this study, we derive an analytical model of an electric potential of a double-gated (DG)
fully depleted (FD) junctionless (J-less) transistor by solving the two-dimensional Poisson's …

Impact of Displacement Defect Owing to Cosmic Rays on Three-Nanometer-Node Nanosheet FET 6T Static Random Access Memory

J Ha, M Bang, G Lee, M Suh, CE Kim, J Kim - IEEE Access, 2023 - ieeexplore.ieee.org
In this work, the effect of displacement defect (DD) owing to cosmic rays on six-transistor (6T)
static random access memory (SRAM) with a 3 nm node nanosheet field-effect transistor …