Laser scanners have been an integral part of MEMS research for more than three decades.
During the last decade, miniaturized projection displays and various medical-imaging …

This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

激光雷达可以高精度, 高准确度地获取目标的距离, 速度等信息或者实现目标成像, 在测绘,
导航等领域具有重要作用. 本文首先介绍了从机械式向全固态过渡的微机械系统激光雷达解决 …

This paper presents the design, fabrication, and characterization of a novel CMOS-
compatible 2-D MEMS scanning mirror based on hybrid actuation mechanisms. Both …

Light detection and ranging (LiDAR) system can be used to capture the distances and
speeds of the targets with high resolution and high accuracy, and can also form imaging. It is …

Based on microelectronic mechanical system (MEMS) processing, a large-size 2-D
scanning mirror (6.5 mm in diameter) driven by electromagnetic force was designed and …

Two-photon microscopy (TPM) based on two-dimensional micro-electro-mechanical
(MEMS) system mirrors shows promising applications in biomedicine and the life sciences …

Microelectromechanical System (MEMS)-based scanning mirrors are important optical
devices that have been employed in many fields as a low-cost and miniaturized solution. In …

While 3-D microelectromechanical systems (MEMS) allow switching between a large
number of ports in optical telecommunication networks, the development of such systems …

A silicon micromirror driven by piezoelectric Pb (Zr, Ti) O3 cantilever actuator has been
demonstrated for 2-D scanning applications. Two different PZT actuator designs have been …