Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits
Alignment is critical for efficient integration of photonic integrated circuits (PICs), and
microelectromechanical systems (MEMS) actuators have shown potential to tackle this …
microelectromechanical systems (MEMS) actuators have shown potential to tackle this …
MEMS positioners with silicon nitride waveguides for photonic integrated circuits alignment
AAS Rabih - 2024 - espace.etsmtl.ca
The integration of active chips such as lasers and semiconductor optical amplifiers into
silicon photonics is essential in photonic integrated circuits. Silicon as the main platform in …
silicon photonics is essential in photonic integrated circuits. Silicon as the main platform in …