Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

With the rapid advancement and widespread applications of information technology in the
manufacturing shop floor, a huge amount of real-time data is generated, providing a good …

Resource failures may happen in automated manufacturing systems (AMSs) because of
different reasons in the real world, making most existing deadlock control policies …

Multi-agent and deteriorating scheduling has gained an increasing concern from academic
and industrial communities in recent years. This study addresses a two-agent stochastic flow …

With the interaction of discrete-event and continuous processes, the short-term scheduling
problem of crude oil operations is essentially combinatorial. Thus, it is preferred to develop …

This paper deals with deadlock problems in Petri nets by adding a set of recovery
transitions. Different from traditional deadlock control methods by deploying control places …

A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools
with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi …

In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …

With growing environmental and sustainability-related concerns, recovery optimization of
mechanical products has been gaining increased exposure. It facilitates environmental …

This paper deals with the identification problem of faulty behavior in a discrete event system,
assuming that the fault-free model of a system is given in terms of Petri nets, where the set of …