Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
ST VAN DER POST, SB Roobol… - US Patent …, 2023 - Google Patents
(57) ABSTRACT A radiation source arrangement causes interaction between pump
radiation (340) and a gaseous medium (406) to generate EUV or soft x-ray radiation by …
radiation (340) and a gaseous medium (406) to generate EUV or soft x-ray radiation by …
Illumination source for an inspection apparatus, inspection apparatus and inspection method
SB Roobol, SGJ Mathijssen - US Patent 10,649,344, 2020 - Google Patents
Disclosed is an illumination source apparatus comprising a high harmonic generation
medium, a pump radiation source and a spatial filter. The pump radiation source emits a …
medium, a pump radiation source and a spatial filter. The pump radiation source emits a …