In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

Compared to conventional sensors, resonant-based sensors output frequency signals
instead of voltage signals and therefore have greater advantages in terms of accuracy, noise …

Resonant accelerometers are promising because of their wide dynamic range and long-term
stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less …

As a result of their IC compatibility, high acoustic velocity, and high thermal conductivity,
aluminum nitride (AlN) resonators have been studied extensively over the past two decades …

This paper introduces a chip-level oven-controlled system for improving the temperature
stability of MEMS resonators wherein we designed the resonator and the micro-hotplate …

In this paper, we demonstrate a dual frequency oven-controlled MEMS resonator that can be
designed to have an output frequency of 1.27 Mhz or 13 Mhz depending on the crystal …

Biomonitoring of dinoflagellate communities in marine ecosystems is essential for efficient
water quality management and limiting ecosystem disturbances. Current identification and …

The design, fabrication and experimental validation of two MicroElectroMechanical Systems
(MEMS) Double-Ended Tuning-Fork (DETF) resonators that exhibit an intrinsic sub-350 ppm …

This paper presents a capacitive bulk mode resonator operating in Lamé mode, where the
motional resistance and temperature stability are enhanced by implementing a set of …

This work investigates the dominant energy dissipations of the multi-frequency whispering
gallery mode (WGM) resonators to provide an insight into the loss mechanisms of the …