Autonomous hybrid optimization of a SiO2 plasma etching mechanism

F Krüger, D Zhang, P Luan, M Park, A Metz… - Journal of Vacuum …, 2024 - pubs.aip.org
Computational modeling of plasma etching processes at the feature scale relevant to the
fabrication of nanometer semiconductor devices is critically dependent on the reaction …

Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching

Y Li, MA Gosálvez, P Pal, K Sato… - … of Micromechanics and …, 2015 - iopscience.iop.org
We combine the particle swarm optimization (PSO) method and the continuous cellular
automaton (CCA) in order to simulate deep reactive ion etching (DRIE), also known as the …

Improvement of deep reactive ion etching process for motional resistance reduction of capacitively transduced vibrating resonators

A Alsolami, A Zaman, IF Rivera… - IEEE sensors …, 2018 - ieeexplore.ieee.org
Motional resistance is one of the most important performance metrics for high quality factor,
low power, and complementary metal-oxide semiconductor (CMOS)-compatible capacitively …

Hybrid RF Acoustic Resonators and Arrays with Integrated Capacitive and Piezoelectric Transducers

A Zaman - 2020 - digitalcommons.usf.edu
Over the past few decades, the usage of mobile communication devices such as
smartphones, laptop computers, tablets has grown significantly. Clearly, smartphones and …

[PDF][PDF] Overview and Applications of Particle Swarm Optimization on GPGPU

SU Mane, MR Pethkar, PK Mahind - International Journal of Computer …, 2014 - Citeseer
ABSTRACT Particle Swarm Optimization is robust and effective method to solve optimization
problems. Particle Swarm Optimization takes more time to find optimal solutions for complex …

[图书][B] Hybrid RF Acoustic Resonators and Arrays with Integrated Capacitive and Piezoelectric

A Zaman - 2020 - search.proquest.com
Over the past few decades, the usage of mobile communication devices such as
smartphones, laptop computers, tablets has grown significantly. Clearly, smartphones and …

[引用][C] Modeling and Simulation of Silicon Dry Etching

Y Xing - Micro Electro Mechanical Systems, 2018 - Springer