Evolving from past black‐and‐white images, through present red‐green‐blue spectral
colors, future remote imaging systems promise spectroscopic functionalities extending well …

Measuring intrinsic macro stresses in fibre-textured thin films have always been challenging.
Due to the nature of preferential orientation in these films, only d-spacings aligned with the …

In this study, the impact of residual tensile stress on a membrane-type piezoelectric MEMS
(Micro Electromechanical Systems) microphone is investigated both theoretically by FEM …

The atomic force microscope (AFM) has provided unprecedented opportunities to study
velocity-dependent interactions between deformable drops and bubbles under a range of …

This paper presents a microelectromechanical systems (MEMS) based hydrogen sensor
utilizing a microcantilever (MC) functionalized with palladium, and an integrated silicon …

Over the past three decades, silicon photonic devices have been core to the realization of
large‐scale photonic‐integrated circuits. However, silicon nitride is another key …

Amorphous silicon nitride SiN x thin films in a thickness range of 40 to 500 nm were
deposited onto (100) silicon wafers using DC magnetron sputtering. The biaxial stress of the …

This paper presents the design, fabrication, and optical characterization of silicon-based thin
film Fabry–Pérot filters for spectroscopic sensing applications at short-wave infrared (SWIR …

Microspectrometers based on the monolithic integration of a microelectromechanical system
(MEMS) Fabry–Pérot filter and a Hg x Cd 1–x Te-based infrared detector are discussed and …

Accessing the immense value of freeform surfaces for mass-sensitive applications such as
space optics or metaform optical components requires fabrication processes that are suited …