The high-quality, high-efficiency micro-hole drilling of structural ceramics to improve the
thermal conductivity of hot-end parts or achieve high-density electronic packaging is still a …

Laser beam drilling (LBD) is one of non contact type unconventional machining process that
are employed in machining of stiff and high-strength materials, high strength temperature …

Structural ceramics are becoming widely popular in numerous fields because of high
mechanical and physical properties. It is of great difficulty for conventional techniques to …

Silicon carbide Ceramic matrix composites (SiC matrix with SiC fibers, abbreviated as
SiC/SiC composites) are widely used in aerospace and energy applications due to their …

Silicon carbide (SiC) ceramic is becoming widely used in multiple industrial applications,
owing to its exceptional high-temperature properties. Yet it is still a challenge to machine …

Abstract SiC/SiC composites (SiC matrix with SiC fibers) play an important role in aerospace
and energy fields because of their excellent resistance to high temperature, corrosion …

Laser-induced plasma micro-machining (LIPMM) process does well in fabricating high-
quality surface microstructures of hard and brittle materials. However, the liquid medium is …

Underwater laser ablation has become an alternative machining process that is able to
reduce the thermal damage in work materials caused by lasers. However, the disturbance of …

This study adopted femtosecond laser with a wavelength of 515 nm to drill high-aspect-ratio
micro through holes on a 500-μm thickness single-crystal SI-type 4H-SiC wafer. Firstly …

Silicon carbide (SiC) ceramics have been widely used for microelectronics, aerospace, and
other industrial fields due to their excellent chemical stability and thermal tolerance …