Nonlinearity of degenerately doped bulk-mode silicon MEMS resonators
We present an experimental study of conservative nonlinearities in bulk acoustic mode (bulk-
mode) silicon MEMS resonators with degenerate doping. Three types of bulk acoustic mode …
mode) silicon MEMS resonators with degenerate doping. Three types of bulk acoustic mode …
DESIGN AND FABRICATION OF A NARROW-BANDWIDTH MICROMECHANICAL RING FILTER USING A NOVEL PROCESS IN UVLIGA TECHNOLOGY
A Bijari, SH Keshmiri, W Wanburee, C Sriphung… - 2012 - sid.ir
DESIGN AND FABRICATION OF A NARROW-BANDWIDTH MICROMECHANICAL RING FILTER
USING A NOVEL PROCESS IN UVLIGA TECHNOLOGY Page 1 Archive of SID 280 Iranian …
USING A NOVEL PROCESS IN UVLIGA TECHNOLOGY Page 1 Archive of SID 280 Iranian …
[图书][B] Nonlinearities in bulk acoustic mode silicon micromechanical resonators
Y Yang - 2016 - search.proquest.com
Capacitive microelectromechanical (MEMS) oscillators represent a promising alternative to
quartz-based systems as they provide benefits such as mass fabrication, size reduction, and …
quartz-based systems as they provide benefits such as mass fabrication, size reduction, and …