An overview of spatial microscopic and accelerated kinetic Monte Carlo methods

A Chatterjee, DG Vlachos - Journal of computer-aided materials design, 2007 - Springer
The microscopic spatial kinetic Monte Carlo (KMC) method has been employed extensively
in materials modeling. In this review paper, we focus on different traditional and multiscale …

Reshaping, intermixing, and coarsening for metallic nanocrystals: Nonequilibrium statistical mechanical and coarse-grained modeling

KC Lai, Y Han, P Spurgeon, W Huang, PA Thiel… - Chemical …, 2019 - ACS Publications
Self-assembly of supported 2D or 3D nanocrystals (NCs) by vacuum deposition and of 3D
NCs by solution-phase synthesis (with possible subsequent transfer to a support) produces …

Microstructural evolution during film growth

I Petrov, PB Barna, L Hultman… - Journal of Vacuum Science …, 2003 - pubs.aip.org
Atomic-scale control and manipulation of the microstructure of polycrystalline thin films
during kinetically limited low-temperature deposition, crucial for a broad range of industrial …

Optical, electronic, and transport properties of nanocrystalline titanium nitride thin films

P Patsalas, S Logothetidis - Journal of Applied Physics, 2001 - pubs.aip.org
Spectroscopic ellipsometry (SE) was employed to get insights on the optical, electronic, and
transport properties of nanocrystalline titanium nitride (TiN x) films with respect to their …

Mapping structure heterogeneities and visualizing moisture degradation of perovskite films with nano-focus WAXS

N Li, S Pratap, V Körstgens, S Vema, L Song… - Nature …, 2022 - nature.com
Extensive attention has focused on the structure optimization of perovskites, whereas rare
research has mapped the structure heterogeneity within mixed hybrid perovskite films …

An improved fuzzy MULTIMOORA approach for multi-criteria decision making based on objective weighting method (CCSD) and its application to technological …

JH Dahooie, EK Zavadskas, HR Firoozfar… - … Applications of Artificial …, 2019 - Elsevier
Abstract MULTIMOORA (Multi-Objective Optimization on the basis of Ratio Analysis plus full
multiplicative form) is a somewhat new multi criteria decision-making (MCDM) method which …

Thin film nucleation, growth, and microstructural evolution: an atomic scale view

JE Greene - Handbook of deposition technologies for films and …, 2010 - Elsevier
Publisher Summary Atomic scale understanding of microstructural evolution, necessary for
the controlled manipulation of the properties of thin film systems, is increasing rapidly. The …

Comprehensive perspective on the mechanism of preferred orientation in reactive-sputter-deposited nitrides

Y Kajikawa, S Noda, H Komiyama - Journal of Vacuum Science & …, 2003 - pubs.aip.org
Texture control of sputter-deposited nitride films has provoked a great deal of interest due to
its technological importance. Despite extensive research, however, the reported results are …

Theory and molecular simulations of plasma sputtering, transport and deposition processes

P Brault, AL Thomann, M Cavarroc - The European Physical Journal D, 2023 - Springer
The present review provides an overview of the basic theory of sputtering with recent
models, focusing in particular on sputtered atom energy distribution functions. Molecular …

On the physical and chemical details of alumina atomic layer deposition: A combined experimental and numerical approach

D Pan, L Ma, Y Xie, TC Jen, C Yuan - Journal of Vacuum Science & …, 2015 - pubs.aip.org
Alumina thin film is typically studied as a model atomic layer deposition (ALD) process due
to its high dielectric constant, high thermal stability, and good adhesion on various wafer …