[HTML][HTML] A brief review of atomic layer deposition: from fundamentals to applications

RW Johnson, A Hultqvist, SF Bent - Materials today, 2014 - Elsevier
Atomic layer deposition (ALD) is a vapor phase technique capable of producing thin films of
a variety of materials. Based on sequential, self-limiting reactions, ALD offers exceptional …

Atomic layer deposition of nanostructured materials for energy and environmental applications

C Marichy, M Bechelany, N Pinna - Advanced materials, 2012 - Wiley Online Library
Atomic layer deposition (ALD) is a thin film technology that in the past two decades rapidly
developed from a niche technology to an established method. It proved to be a key …

Methods for using atomic layer deposition to produce a film for solid state electrolytes and protective electrode coatings for lithium batteries

JW Elam, X Meng - US Patent 9,917,295, 2018 - Google Patents
A method for using atomic layer deposition to produce a film configured for use in an anode,
cathode, or solid state electrolyte of a lithium-ion battery or a lithium-sulfur battery. The …

Atomic and molecular layer deposition: off the beaten track

H Van Bui, F Grillo, JR Van Ommen - Chemical Communications, 2017 - pubs.rsc.org
Atomic layer deposition (ALD) is a gas-phase deposition technique that, by relying on self-
terminating surface chemistry, enables the control of the amount of deposited material down …

[PDF][PDF] Perovskite thin films via atomic layer deposition

BR Sutherland, S Hoogland, MM Adachi… - Advanced …, 2015 - light.northwestern.edu
DOI: 10.1002/adma. 201403965 technology, now adopted in the electronics industry in
semiconductor manufacturing. Furthermore, ALD has demonstrated viability in high …

Atomic layer deposition of platinum catalysts on nanowire surfaces for photoelectrochemical water reduction

NP Dasgupta, C Liu, S Andrews… - Journal of the …, 2013 - ACS Publications
The photocathodic hydrogen evolution reaction (HER) from p-type Si nanowire (NW) arrays
was evaluated using platinum deposited by atomic layer deposition (ALD) as a HER …

Atomic layer deposition of metal sulfide materials

NP Dasgupta, X Meng, JW Elam… - Accounts of chemical …, 2015 - ACS Publications
Conspectus The field of nanoscience is delivering increasingly intricate yet elegant
geometric structures incorporating an ever-expanding palette of materials. Atomic layer …

Quantum dot nanoscale heterostructures for solar energy conversion

RS Selinsky, Q Ding, MS Faber, JC Wright… - Chemical Society …, 2013 - pubs.rsc.org
Quantum dot nanoscale semiconductor heterostructures (QDHs) are a class of materials
potentially useful for integration into solar energy conversion devices. However, realizing the …

Advances in atomic layer deposition of metal sulfides: from a precursors perspective

SJA Zaidi, MA Basit, TJ Park - Chemistry of Materials, 2022 - ACS Publications
Development at the nanoscale has established diverse and complex structures with the help
of a growing selection of materials to choose from. Among the major developments that has …

Nanoengineering and interfacial engineering of photovoltaics by atomic layer deposition

JR Bakke, KL Pickrahn, TP Brennan, SF Bent - Nanoscale, 2011 - pubs.rsc.org
Investment into photovoltaic (PV) research has accelerated over the past decade as
concerns over energy security and carbon emissions have increased. The types of PV …