[HTML][HTML] A brief review of atomic layer deposition: from fundamentals to applications
RW Johnson, A Hultqvist, SF Bent - Materials today, 2014 - Elsevier
Atomic layer deposition (ALD) is a vapor phase technique capable of producing thin films of
a variety of materials. Based on sequential, self-limiting reactions, ALD offers exceptional …
a variety of materials. Based on sequential, self-limiting reactions, ALD offers exceptional …
Atomic layer deposition of nanostructured materials for energy and environmental applications
C Marichy, M Bechelany, N Pinna - Advanced materials, 2012 - Wiley Online Library
Atomic layer deposition (ALD) is a thin film technology that in the past two decades rapidly
developed from a niche technology to an established method. It proved to be a key …
developed from a niche technology to an established method. It proved to be a key …
Methods for using atomic layer deposition to produce a film for solid state electrolytes and protective electrode coatings for lithium batteries
A method for using atomic layer deposition to produce a film configured for use in an anode,
cathode, or solid state electrolyte of a lithium-ion battery or a lithium-sulfur battery. The …
cathode, or solid state electrolyte of a lithium-ion battery or a lithium-sulfur battery. The …
Atomic and molecular layer deposition: off the beaten track
Atomic layer deposition (ALD) is a gas-phase deposition technique that, by relying on self-
terminating surface chemistry, enables the control of the amount of deposited material down …
terminating surface chemistry, enables the control of the amount of deposited material down …
[PDF][PDF] Perovskite thin films via atomic layer deposition
DOI: 10.1002/adma. 201403965 technology, now adopted in the electronics industry in
semiconductor manufacturing. Furthermore, ALD has demonstrated viability in high …
semiconductor manufacturing. Furthermore, ALD has demonstrated viability in high …
Atomic layer deposition of platinum catalysts on nanowire surfaces for photoelectrochemical water reduction
The photocathodic hydrogen evolution reaction (HER) from p-type Si nanowire (NW) arrays
was evaluated using platinum deposited by atomic layer deposition (ALD) as a HER …
was evaluated using platinum deposited by atomic layer deposition (ALD) as a HER …
Atomic layer deposition of metal sulfide materials
Conspectus The field of nanoscience is delivering increasingly intricate yet elegant
geometric structures incorporating an ever-expanding palette of materials. Atomic layer …
geometric structures incorporating an ever-expanding palette of materials. Atomic layer …
Quantum dot nanoscale heterostructures for solar energy conversion
RS Selinsky, Q Ding, MS Faber, JC Wright… - Chemical Society …, 2013 - pubs.rsc.org
Quantum dot nanoscale semiconductor heterostructures (QDHs) are a class of materials
potentially useful for integration into solar energy conversion devices. However, realizing the …
potentially useful for integration into solar energy conversion devices. However, realizing the …
Advances in atomic layer deposition of metal sulfides: from a precursors perspective
Development at the nanoscale has established diverse and complex structures with the help
of a growing selection of materials to choose from. Among the major developments that has …
of a growing selection of materials to choose from. Among the major developments that has …
Nanoengineering and interfacial engineering of photovoltaics by atomic layer deposition
Investment into photovoltaic (PV) research has accelerated over the past decade as
concerns over energy security and carbon emissions have increased. The types of PV …
concerns over energy security and carbon emissions have increased. The types of PV …