Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
Scheduling in semiconductor manufacturing is of vital importance due to the impact on
production performance indicators such as equipment utilization, cycle time, and delivery …
production performance indicators such as equipment utilization, cycle time, and delivery …
A literature review on sampling techniques in semiconductor manufacturing
J Nduhura-Munga, G Rodriguez-Verjan… - IEEE Transactions …, 2013 - ieeexplore.ieee.org
This paper reviews sampling techniques for inspection in semiconductor manufacturing. We
discuss the strengths and weaknesses of techniques developed in the last last 20 years for …
discuss the strengths and weaknesses of techniques developed in the last last 20 years for …
Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical study
CF Chien, TH Van Nguyen, YC Li, YJ Chen - Computers & Industrial …, 2023 - Elsevier
In-line metrology for defect inspection is employed for quality control and calibration of data-
driven models for intelligent manufacturing. However, defect inspection is time-consuming …
driven models for intelligent manufacturing. However, defect inspection is time-consuming …
Quality control planning to prevent excessive scrap production
This paper presents a risk-based approach for quality control planning of complex discrete
manufacturing processes, to prevent massive scraps to occur. An analytical model is …
manufacturing processes, to prevent massive scraps to occur. An analytical model is …
Simulation-based optimization of sampling plans to reduce inspections while mastering the risk exposure in semiconductor manufacturing
Semiconductor manufacturing processes are very long and complex, needing several
hundreds of individual steps to produce the final product (chip). In this context, the early …
hundreds of individual steps to produce the final product (chip). In this context, the early …
Feasibility evaluation of virtual metrology for the example of a trench etch process
G Roeder, S Winzer, M Schellenberger… - IEEE Transactions …, 2014 - ieeexplore.ieee.org
In semiconductor manufacturing, the implementation of advanced process control systems
has become essential for cost effective manufacturing at high product quality. In addition to …
has become essential for cost effective manufacturing at high product quality. In addition to …
Quality and exposure control in semiconductor manufacturing. Part I: Modelling
The purpose of this paper is to present a heuristic algorithm for quality control planning from
an insurance perspective. The approach proposed here is designed to judiciously allocate …
an insurance perspective. The approach proposed here is designed to judiciously allocate …
Dynamic management of controls in semiconductor manufacturing
JN Munga, S Dauzère-Pérès… - 2011 IEEE/SEMI …, 2011 - ieeexplore.ieee.org
In order to optimize the number of controls in semiconductor manufacturing, a Permanent
Index per Context (IPC) has been developed to evaluate in real-time the risk on production …
Index per Context (IPC) has been developed to evaluate in real-time the risk on production …
A dynamic sampling methodology for plasma etch processes using Gaussian process regression
Plasma etch is a key process in modern semiconductor manufacturing facilities as it offers
process simplification and yet greater dimensional tolerances compared to wet chemical …
process simplification and yet greater dimensional tolerances compared to wet chemical …
Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing
GLR Verjan, S Dauzère-Pérès… - Proceedings of the 2011 …, 2011 - ieeexplore.ieee.org
In this paper, we analyze the impact of control plan design of defectivity inspections for tool
risk management. Defectivity inspections are performed on products and can reveal the …
risk management. Defectivity inspections are performed on products and can reveal the …