Scatterometry is frequently used as a non-imaging indirect optical method to reconstruct the
critical dimensions (CD) of periodic nanostructures. A particular promising direction is EUV …

We investigate the impact of line edge and line width roughness (LER, LWR) on the
measured diffraction intensities in angular resolved extreme ultraviolet (EUV) scatterometry …

A novel type of deep ultraviolet scatterometer recently developed and set up at PTB has
been significantly improved with respect to the dynamic range and the signal-to-noise ratio …

This study undertakes a comprehensive analytical and numerical investigation of the
nonlinear Kairat model, a significant evolution equation that governs a wide range of …

In this study, we investigate the complex dynamics of the (1+ 1)-dimensional generalized
Burgers–Fisher (GBF) model, a nonlinear partial differential equation that encapsulates the …

This study introduces innovative analytical solutions for the (2+ 1)-dimensional nonlinear
Jaulent–Miodek (𝕁 𝕄) equation, a governing model elucidating the propagation …

Abstract The nonlinear Semilinear Dispersive-Fisher (SDF) model is an important equation
describing wave dynamics in dispersive media influenced by nonlinear and diffusive effects …

In the present paper, we propose a 2D-Fourier transform method as a simple and efficient
algorithm for stochastical and numerical studies to investigate the systematic impacts of line …

The characterization of nanostructured surfaces by scatterometry is an established method
in wafer metrology. From measured light diffraction patterns, critical dimensions (CD) of …

Previous work has shown that the reconstruction of geometric parameters describing the
profile of an attenuated phase shift (MoSi) photomask is possible by a least-square …