Measurement and modeling of gas flows in microelectromechanical systems (MEMS) scale
channels are relevant to the fundamentals of rarefied gas dynamics (RGD) and the practical …

This paper presents an overview of the design and technology of miniature X-ray sources of
various types, which can be useful in the portable instruments for diagnosis and precision …

This paper describes a Micro-Electro-Mechanical System-type self-packaged field-emission
electron source with a carbon nanotube cathode. It is a multilayer silicon-glass structure …

The microengineered MEMS-type ion-sorption micropump with field-emission electron
source has been shown. Effective emission properties of the carbon nanotubes cathode …

In this letter we present the first stand-alone X-ray source made in MEMS (micro-electro-
mechanical system) technology, which is able to operate outside a vacuum chamber. We …

Generation and maintenance of the high vacuum in the MEMS-type (micro-electro-
mechanical system) microsystems and vacuum nanoelectronics devices remain a major …

This paper describes a microelectromechanical-system-type field emission electron source
fabricated as a planar silicon structure bonded with a glass substrate. It consists of a carbon …

The article presents a detailed characterization of the ionization process taking place inside
a miniature MEMS-type ion-sorption vacuum pump, based on the Penning pump …

In this paper, the authors demonstrate how to improve the properties of a recently elaborated
microelectromechanical system (MEMS) ion-sorption micropump in order to generate high …

Copper thermocompression is a promising wafer-level packaging technique, as it allows the
bonding of electric contacts simultaneously to hermetic encapsulation. In …