[HTML][HTML] A review of Ga2O3 materials, processing, and devices

SJ Pearton, J Yang, PH Cary, F Ren, J Kim… - Applied Physics …, 2018 - pubs.aip.org
Gallium oxide (Ga 2 O 3) is emerging as a viable candidate for certain classes of power
electronics, solar blind UV photodetectors, solar cells, and sensors with capabilities beyond …

β-Ga2O3 for wide-bandgap electronics and optoelectronics

Z Galazka - Semiconductor Science and Technology, 2018 - iopscience.iop.org
Abstract β-Ga 2 O 3 is an emerging, ultra-wide bandgap (energy gap of 4.85 eV) transparent
semiconducting oxide, which attracted recently much scientific and technological attention …

Progress in state-of-the-art technologies of Ga2O3 devices

C Wang, J Zhang, S Xu, C Zhang, Q Feng… - Journal of Physics D …, 2021 - iopscience.iop.org
Abstract Gallium oxide (Ga 2 O 3), an emerging ultra-wide-bandgap semiconductor, has the
desirable properties of a large bandgap of 4.6–4.9 eV, an estimated critical breakdown field …

3.8-MV/cm Breakdown Strength of MOVPE-Grown Sn-Doped -Ga2O3 MOSFETs

AJ Green, KD Chabak, ER Heller… - IEEE Electron …, 2016 - ieeexplore.ieee.org
A Sn-doped (100)-Ga 2 O 3 epitaxial layer was grown via metal–organic vapor phase
epitaxy onto a single-crystal, Mg-doped semi-insulating (100)-Ga 2 O 3 substrate. Ga 2 O 3 …

Donors and deep acceptors in β-Ga2O3

AT Neal, S Mou, S Rafique, H Zhao, E Ahmadi… - Applied Physics …, 2018 - pubs.aip.org
We have studied the properties of Si, Ge shallow donors and Fe, Mg deep acceptors in β-Ga
2 O 3 through temperature dependent van der Pauw and Hall effect measurements of …

[HTML][HTML] Enhancement-mode Ga2O3 wrap-gate fin field-effect transistors on native (100) β-Ga2O3 substrate with high breakdown voltage

KD Chabak, N Moser, AJ Green, DE Walker… - Applied Physics …, 2016 - pubs.aip.org
Sn-doped gallium oxide (Ga 2 O 3) wrap-gate fin-array field-effect transistors (finFETs) were
formed by top-down BCl 3 plasma etching on a native semi-insulating Mg-doped (100) β-Ga …

High-Mobility MOCVD β-Ga2O3 Epitaxy with Fast Growth Rate Using Trimethylgallium

L Meng, Z Feng, AFMAU Bhuiyan… - Crystal Growth & …, 2022 - ACS Publications
In this work, metalorganic chemical vapor deposition (MOCVD) of (010) β-Ga2O3 with fast
growth rates was investigated using trimethylgallium (TMGa) as the gallium (Ga) precursor …

[HTML][HTML] MOCVD growth of high purity Ga2O3 epitaxial films using trimethylgallium precursor

G Seryogin, F Alema, N Valente, H Fu… - Applied Physics …, 2020 - pubs.aip.org
We report on the growth of β-Ga 2 O 3 thin films using trimethylgallium (TMGa) as a source
for gallium and pure O 2 for oxidation. The growth rate of the films was found to linearly …

Recent progress on the effects of impurities and defects on the properties of Ga 2 O 3

Y Wang, J Su, Z Lin, J Zhang, J Chang… - Journal of Materials …, 2022 - pubs.rsc.org
Ga2O3 is attractive for power devices and solar-blind ultraviolet photodetectors due to its
ultra-wide bandgap, large breakdown field, and favorable stability. However, it is difficult to …

Si-and Sn-doped homoepitaxial β-Ga2O3 layers grown by MOVPE on (010)-oriented substrates

M Baldini, M Albrecht, A Fiedler… - ECS Journal of Solid …, 2016 - iopscience.iop.org
We studied the growth of Si-and Sn-doped homoepitaxial β-Ga 2 O 3 layers on (010)-
oriented substrates by metal organic vapor phase epitaxy (MOVPE). At optimal growth …