Piezoelectric MEMS resonators: A review

G Pillai, SS Li - IEEE Sensors Journal, 2020 - ieeexplore.ieee.org
Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

Monolithic single PMUT-on-CMOS ultrasound system with+ 17 dB SNR for imaging applications

I Zamora, E Ledesma, A Uranga, N Barniol - IEEE Access, 2020 - ieeexplore.ieee.org
This article presents a fully integrated ultrasound system based on a single piezoelectric
micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm …

Monolithic multiband MEMS RF front-end module for 5G mobile

H Campanella, Y Qian, CO Romero… - Journal of …, 2020 - ieeexplore.ieee.org
This work reports a monolithic RF front-end module integrating bulk acoustic wave (BAW)
filters, Lamb acoustic wave filters, and electronic RF silicon-on-insulator (RFSOI) switches to …

Thermally modulated cmos-compatible particle sensor for air quality monitoring

JP Specht, S Esfahani, Y Xing, A Köck… - IEEE Transactions …, 2022 - ieeexplore.ieee.org
Combating the health effects of particulate matter (PM) pollution requires affordable and
reliable real-time air quality monitoring. The potential for large-scale manufacturing of …

AlN FBAR particle sensor with a thermophoretic sampling mechanism

JP Specht, S Esfahani, TH Tan… - IEEE Sensors …, 2021 - ieeexplore.ieee.org
Pollution by particulate matter (PM) poses a serious and growing risk to human health. Film
Bulk Acoustic Resonators (FBARs) have been proposed as a low-cost way to monitor …

Evaluating film assisted molding packaging for peizoelectric micromachined ultrasonic transducers

TH Tan, M Soundara-Pandian… - 2021 IEEE 34th …, 2021 - ieeexplore.ieee.org
This paper presents the evaluation of Film Assisted Molding (FAM) technology on
Piezoelectric micromachined ultrasonic transducers (PMUT) arrays. Film Assisted Molding …

Thermally modulated solidly mounted resonators for air quality monitoring

JP Specht - 2022 - wrap.warwick.ac.uk
The effect of air pollution on the environment and human health is a cause of major concern.
Each year millions of deaths are attributed to poor air quality, and it is estimated that its …

A Novel Bulk Acoustic Wave Based Super-Harmonic Quadrature Voltage Control Oscillator

AJ Baruah - 2022 - search.proquest.com
As the demand for wireless connectivity increases, new power and area efficient solutions
will be required to meet the specifications of these systems. Most transceivers require a local …

Design of a front-end ASIC for a fully integrated ultrasound PMUT array in CMOS

I Zamora - 2022 - ddd.uab.cat
Avui en dia, els avenços en transductors ultrasònics MEMS miniaturitzats requereixen grans
esforços en el disseny dels circuits electrònics d'interfície per tal d'aprofitar el seu menor …

[PDF][PDF] Monolithic Single PMUT-on-CMOS Ultrasound System With+ 17 dB SNR for Imaging Applications

N BARNIOL - scholar.archive.org
This article presents a fully integrated ultrasound system based on a single piezoelectric
micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 µm …