Sculpting silicon at the micro and nano scales has been game‐changing to mold bulk silicon
properties and expand, in turn, applications of silicon beyond electronics, namely, in …

This work demonstrates the micro-heat sink based on silicon nanowires formed by metal-
assisted chemical etching (MACE) for heat dissipation enhancement to improve the …

Metal-assisted chemical etching (MACE) is a flexible technique for texturing the surface of
semiconductors. In this work, we study the spatial variation of the etch profile, the effect of …

In this work, we design a micro-vibration platform, which combined with the traditional metal-
assisted chemical etching (MaCE) to etch silicon nanowires (SiNWs). The etching …

Silicon structures with ultra-high aspect ratios have great potential applications in the fields
of optoelectronics and biomedicine. However, the slope and increased roughness of the …

Antireflective (AR) nanostructures offer an effective, broadband alternative to conventional
AR coatings that could be used even under extreme conditions. In this publication, a …

This paper reports a new type of nanoimprinting method called Bi-layer nanoimprinting
lithography (BL-NIL), which can work along with metal-assisted chemical etching (MaCE) for …

Liquid-infused surfaces (LIS), formed of a nano-or micro-structured porous material that is
impregnated with a lubricating fluid, are biomimics of the pitcher plant. Their slippery surface …

Актуальность темы исследования. Фундаментальные исследования, направленные на
разработку гибридных полимерных материалов многофункционального назначения, в …