High‐speed and low‐energy nitride memristors
High‐performance memristors based on AlN films have been demonstrated, which exhibit
ultrafast ON/OFF switching times (≈ 85 ps for microdevices with waveguide) and relatively …
ultrafast ON/OFF switching times (≈ 85 ps for microdevices with waveguide) and relatively …
Methods for depositing Group 13 metal or metalloid nitride films
X Lei, M Kim, SV Ivanov - US Patent 10,745,808, 2020 - Google Patents
Described herein are methods for forming a Group 13 metal or metalloid nitride film. In one
aspect, there is provided a method of forming an aluminum nitride film comprising the steps …
aspect, there is provided a method of forming an aluminum nitride film comprising the steps …
XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition
P Motamedi, K Cadien - Applied Surface Science, 2014 - Elsevier
X-ray photoelectron spectroscopy has been used to investigate the properties of AlN films
deposited using a low temperature plasma-enhanced atomic layer deposition process …
deposited using a low temperature plasma-enhanced atomic layer deposition process …
Hollow cathode plasma-assisted atomic layer deposition of crystalline AlN, GaN and Al x Ga 1− x N thin films at low temperatures
The authors report on the use of hollow cathode plasma for low-temperature plasma-
assisted atomic layer deposition (PA-ALD) of crystalline AlN, GaN and AlxGa1− xN thin films …
assisted atomic layer deposition (PA-ALD) of crystalline AlN, GaN and AlxGa1− xN thin films …
Enabling highly enhanced solar thermoelectric generator efficiency by a CuCrMnCoAlN-based spectrally selective absorber
X Liu, P Zhao, CY He, WM Wang, BH Liu… - … Applied Materials & …, 2022 - ACS Publications
Harvesting solar energy to enhance thermoelectric generator efficiency is a highly effective
strategy. However, it is a grand challenge but essential to increase solar-thermal conversion …
strategy. However, it is a grand challenge but essential to increase solar-thermal conversion …
Perspectives and progress on wurtzite ferroelectrics: Synthesis, characterization, theory, and device applications
J Casamento, SM Baksa, D Behrendt… - Applied Physics …, 2024 - pubs.aip.org
Wurtzite ferroelectrics are an emerging material class that expands the functionality and
application space of wide bandgap semiconductors. Promising physical properties of binary …
application space of wide bandgap semiconductors. Promising physical properties of binary …
High entropy nitride (HEN) thin films of AlCoCrCu0. 5FeNi deposited by reactive magnetron sputtering
Thin films of high entropy alloys (HEAs) are of great interest for surface engineering
applications due to their exceptional properties including superior hardness, resistance to …
applications due to their exceptional properties including superior hardness, resistance to …
Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
X Li, HL Lu, HP Ma, JG Yang, JX Chen, W Huang… - Current Applied …, 2019 - Elsevier
Thin Ga 2 O 3 films were grown on Si (100) using trimethylgallium (TMG) and oxygen as the
precursors through plasma-enhanced atomic layer deposition. The depositions were made …
precursors through plasma-enhanced atomic layer deposition. The depositions were made …
Structural and optical characterization of low-temperature ALD crystalline AlN
P Motamedi, K Cadien - Journal of Crystal Growth, 2015 - Elsevier
A plasma enhanced atomic layer deposition (PEALD) process has been used to deposit
crystalline AlN thin films at 250° C using nitrogen 5% hydrogen plasma and …
crystalline AlN thin films at 250° C using nitrogen 5% hydrogen plasma and …
[HTML][HTML] The stability of graphene and boron nitride for III-nitride epitaxy and post-growth exfoliation
A challenging approach, but one providing a key solution to material growth, remote epitaxy
(RE)—a novel concept related to van der Waals epitaxy (vdWE)—requires the stability of a …
(RE)—a novel concept related to van der Waals epitaxy (vdWE)—requires the stability of a …