Piezoelectric micromachined ultrasonic transducers (PMUTs): performance metrics, advancements, and applications
With the development of technology, systems gravitate towards increasing in their
complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic …
complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic …
Thin-film PMUTs: A review of over 40 years of research
Thin-film PMUTs have been important research topics among microultrasound experts, and
a concise review on their research progress is reported herein. Through rigorous surveying …
a concise review on their research progress is reported herein. Through rigorous surveying …
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and
compressibility with a compact and small design is presented. The fluid measurement …
compressibility with a compact and small design is presented. The fluid measurement …
A PMUT integrated microfluidic system for fluid density sensing
We demonstrate the design, fabrication and use of a dual electrode PMUT (Piezoelectric
Micromachined Ultrasound Transducer) integrated with a microfluidic channel as a fluid …
Micromachined Ultrasound Transducer) integrated with a microfluidic channel as a fluid …
Body conformal linear ultrasound array for combined ultrasound and photoacoustic imaging
We report on the development of combined ultrasound and photoacoustic imaging system
using Lead Zirconate Titanate (PZT) based flexible bulk transducer arrays. The transducer …
using Lead Zirconate Titanate (PZT) based flexible bulk transducer arrays. The transducer …
Photoacoustic image quality improvement from a single cell low frequency pmut
Photoacoustic image (PAI) quality improvement using a low frequency piezoelectric
micromachined ultrasound transducer (PMUT) having the fundamental resonant frequency 1 …
micromachined ultrasound transducer (PMUT) having the fundamental resonant frequency 1 …
Image quality enhancement of PMUT-based photoacoustic imaging
Photoacoustic imaging (PAI) is now a very promising imaging technique that provides image
with sufficient depth, good resolution, and optical contrast. A conventional PAI system is …
with sufficient depth, good resolution, and optical contrast. A conventional PAI system is …
An optofluidic dye concentration detector based on the pulsed photoacoustic effect
We report the development of an opto-acousto-fluidic platform by combining an illumination
source in the form of a pulsed laser, a microfluidic channel, and an ultrasound transducer to …
source in the form of a pulsed laser, a microfluidic channel, and an ultrasound transducer to …
Pmut-powered photoacoustic detection: Revolutionizing microfluidic concentration measurements
This report introduces a novel optofluidic platform based on piezo-microelectromechanical
systems (MEMS) technology, capable of identifying subtle variations in the fluid …
systems (MEMS) technology, capable of identifying subtle variations in the fluid …
A PMUT based photoacoustic system as a microfluidic concentration detector
We report on the development of a novel piezo-MEMS-based optofluidic platform to detect
the concentration of various species dissolved in a fluid. This platform employs piezoelectric …
the concentration of various species dissolved in a fluid. This platform employs piezoelectric …