Chemically tailored block copolymers for highly reliable sub-10-nm patterns by directed self-assembly
S Maekawa, T Seshimo, T Dazai, K Sato… - Nature …, 2024 - nature.com
While block copolymer (BCP) lithography is theoretically capable of printing features smaller
than 10 nm, developing practical BCPs for this purpose remains challenging. Herein, we …
than 10 nm, developing practical BCPs for this purpose remains challenging. Herein, we …
Tunable Thin Film Periodicities by Controlling the Orientation of Cylindrical Domains in Side Chain Liquid Crystalline Block Copolymers
A facile approach to block copolymer (BCP) domain orientation control in thin films has been
demonstrated by employing a BCP with liquid crystalline semifluorinated side chains by …
demonstrated by employing a BCP with liquid crystalline semifluorinated side chains by …