Performance analysis of FEM simulated different shaped membranes based capacitive MEMS sensor
The study of a micro-electro-mechanical-system (MEMS) based capacitive micromachined
ultrasonic transducer (CMUT) is considered. The characteristics and behavioral studies of …
ultrasonic transducer (CMUT) is considered. The characteristics and behavioral studies of …
Investigation and analysis of MEMS based capacitive sensor's characteristics with the effect of electrode pattern
Precise investigational model of a capacitive micromachined ultrasonic transducer (CMUT)
is offered for assessing membrane displacement along with the impact of the top electrode …
is offered for assessing membrane displacement along with the impact of the top electrode …