Performance analysis of FEM simulated different shaped membranes based capacitive MEMS sensor

C Hmingthansanga, R Maity, BK Nath, S Dutta… - Microsystem …, 2024 - Springer
The study of a micro-electro-mechanical-system (MEMS) based capacitive micromachined
ultrasonic transducer (CMUT) is considered. The characteristics and behavioral studies of …

Investigation and analysis of MEMS based capacitive sensor's characteristics with the effect of electrode pattern

C Hmingthansanga, R Maity, S Dutta… - Microsystem Technologies, 2024 - Springer
Precise investigational model of a capacitive micromachined ultrasonic transducer (CMUT)
is offered for assessing membrane displacement along with the impact of the top electrode …