Microelectromechanical systems (MEMS) accelerometers have been considerably
developed since their wide use in current industrial applications. MEMS resonant …

In this paper, the viability of MEMS accelerometers is investigated to measure vibration
parameters related to different locations of a vehicle with respect to the automotive dynamic …

Temperature compensation with high accuracy is crucial for improving the performance of
MEMS resonant accelerometers. In this paper, we propose an effective temperature …

This paper presents a novel MEMS based ring resonator design inspired by the rose petal
structure. The proposed design has four petal springs supporting the ring structure …

Analytical and numerical modeling techniques are presented to predict n-type-doped silicon
resonators' temperature coefficient frequencies for the extensional mode of vibration by …

This paper presents beam modeling techniques for maximizing mechanical sensitivity of a
butterfly resonator for gyroscopic applications. We investigate the geometric aspects of …

The elastic properties of structural materials considerably influence the resonant frequency
of silicon MEMS resonators and their sensitivity to temperature variations. This work studies …

This paper reports on the implementation of a vacuum-encapsulated bi-axial resonant
accelerometer utilizing the electrostatic frequency modulation (eFM) technique. A novel …

Microelectromechanical systems (MEMS) inertial sensors are widely used in many motion
sensing applications including acceleration and orientation. Many of these sensors employ …

Silicon is widely used as the device material for many micro resonators applied in timing and
frequency referencing. One key disadvantage of silicon resonators compared to quartz …