MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical,
electronic, optical, and other components on a substrate to construct functional devices …

3,336,534 5/1975 Cook, Jr_ et a1_. In the formation of m1crostructures, a preformed sheet
3,984,582 10/1976 Feder et a1.. of phot0res1st, such as polymethylmethacrylate 4,035,522 …

For efficient operation, micromotors and microactuators, such as those employed in
microsystems, are required to operate with high electric fields at electrode separations of the …

Micromechanical structures capable of actuation for pur poses such as fluid flow control are
formed on substrates in sizes in the range of one or two millimeters or less using …

In the formation of microstructures, a preformed sheet of photoresist, such as
polymethylmethacrylate (PMMA), which is strain free, may be milled down before or after …

This research deals with the development of a simple and practical method for
manufacturing high-aspect-ratio (height/width) micro-parts and three-dimensional micro …

An innovative technology for the realization of key elements of a microfabricated reduction
unit is presented. In view of integrating the functions of gear, pinion and axle into one …

Organic light-emitting diode (OLED) has been the subject of much interest in the lighting and
display module. This study focuses on how to enhance brightness and scatter through a …

In the formation of microstructures, a preformed sheet of photoresist, such as
polymethylmethacrylate (PMMA), which is strain free, may be milled down before or after …