One embodiment of the present invention sets forth a sys tem for generating a temperature-
compensated timing signal. The system comprises a digitally controlled oscillator (DCO) …

US PATENT DOCUMENTS FOREIGN PATENT DOCUMENTS 7,436,227 B2* 10/2008
Thomsen et al.............. 327,147 JP 05-122064 A 5, 1993 7,453,324 B2 11/2008 Partridge et …

Embodiments of the present disclosure provide self-cali brated thermal sensors of an
integrated circuit (IC) die and associated techniques and configurations. In one embodi …

(57) ABSTRACT A MEMS array structure including a plurality of bulk mode resonators may
include at least one resonator coupling sec tion disposed between the plurality of bulk mode …

The invention concerns a micromechanical device and method of manufacturing thereof.
The device comprises an oscillating or deflecting element made of semiconductor material …

(63) Continuation of application No. 1 1/649,433, filed on Official Communication from the
European Patent Office dated Dec. Jan. 4, 2007, and a continuation-in-part of application 4 …

No. 1 1/328,979, filed on Jan. 10, 2006, and a continu-(Continued) ation-in-part of
application No. 10/892,709, filed on Primary Examiner Arnold Kinkead Jul. 16, 2004, now …

A method to detect the temperature of a micromechanical resonator by measuring the
frequency-shifts of two different eigenmodes is presented. The resonator is a square …

This invention was made with government Support under Contract No. 70NANB4H3001
awarded by the National Institute for Standards and Technology (NIST). The govern ment …

A digital controlled oscillator including a programmable current source, a first variable
capacitor and a second variable capacitor. A comparator compares the voltage across the …