As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …

The miniaturization of microelectromechanical systems (MEMS) physical sensors is driven
by global connectivity needs and is closely linked to emerging digital technologies and the …

The microelectromechanical system (MEMS) vibrating ring gyroscope (VRG) holds
significant promise for angle sensing applications, with its performance highly reliant on the …

Silicon nanowires are among the most promising nanotechnology building blocks in
innovative devices with numerous applications as nanoelectromechanical systems …

We present long-term stress compensation results for a 3.2 mm diameter ring gyroscope
integrated with 16 capacitive stress sensors for the first time in this work. A bridge-type …

This work introduces a system formed by an integrated circuit (IC) and a micromachined
piezoresistive gyroscope, with navigation grade performance. After discussing the …

Axi-symmetry micro gyroscopes are increasingly popular for their ultrahigh measurement
sensitivity. However, a side effect is the bias repeatability problem. In this article, we propose …

With the performance of micromechanical gyroscopes approaching navigation grade, the
scale factor nonlinearity is gradually becoming the limitation for high-performance …

The damage inflicted to silicon nanowires (Si NWs) during the HF vapor etch release poses
a challenge to the monolithic integration of Si NWs with higher-order structures, such as …

In this paper, we propose a novel, flower-like disk resonator (FDR). The structure is made up
of concentrically meander-shaped rings that are interconnected by straight beams, which …