Structured plane illumination microscopy
RE Betzig, K Wang - US Patent 10,051,240, 2018 - Google Patents
An apparatus includes a light source configured for generating a coherent light beam having
a wavelength, λ, a light detector, and beam-forming optics configured for receiving the …
a wavelength, λ, a light detector, and beam-forming optics configured for receiving the …
Bessel beam plane illumination microscope
RE Betzig - US Patent 9,477,074, 2016 - Google Patents
A microscope has a light source for generating a light beam having a wavelength, λ, and
beam-forming optics configured for receiving the light beam and generating a Bessel-like …
beam-forming optics configured for receiving the light beam and generating a Bessel-like …
Bessel beam plane illumination microscope
RE Betzig - US Patent 9,891,421, 2018 - Google Patents
A microscope has a light source for generating a light beam having a wavelength, λ, and
beam-forming optics configured for receiving the light beam and generating a Bessel-like …
beam-forming optics configured for receiving the light beam and generating a Bessel-like …
Method of generating enhanced intra-resonator laser light, enhancement resonator and laser device
J Kaster, I Pupeza, E Fill, F Krausz - US Patent 8,976,834, 2015 - Google Patents
(57) ABSTRACT A method of generating intra-resonator laser light (1) com prises the steps
of coupling input laser light (2), eg laser pulse or continuous-wave light, into an …
of coupling input laser light (2), eg laser pulse or continuous-wave light, into an …
Bessel beam plane illumination microscope
RE Betzig - US Patent 9,791,685, 2017 - Google Patents
A microscope has a light source for generating a light beam having a wavelength, λ, and
beam-forming optics configured for receiving the light beam and generating a Bessel-like …
beam-forming optics configured for receiving the light beam and generating a Bessel-like …
Structured plane illumination microscopy
RE Betzig, K Wang - US Patent 10,721,441, 2020 - Google Patents
An apparatus includes a light source configured for generating a coherent light beam having
a wavelength, λ, a light detector, and beam-forming optics configured for receiving the …
a wavelength, λ, a light detector, and beam-forming optics configured for receiving the …
Bessel beam plane illumination microscope
RE Betzig - US Patent 10,509,217, 2019 - Google Patents
A microscope has a light source for generating a light beam having a wavelength, à, and
beam-forming optics config ured for receiving the light beam and generating a Bessel like …
beam-forming optics config ured for receiving the light beam and generating a Bessel like …
Method and apparatus for generating illuminating radiation
N Lin, SB Roobol, SGJ Mathijssen - US Patent 10,048,596, 2018 - Google Patents
An method for generating illuminating radiation in an illumination apparatus for use in an
inspection apparatus for use in lithographic processes is described. A driving radiation …
inspection apparatus for use in lithographic processes is described. A driving radiation …
Illumination source for an inspection apparatus, inspection apparatus and inspection method
PAJ Tinnemans, N Lin, SB Roobol… - US Patent …, 2019 - Google Patents
Disclosed is an illumination source for generating measure ment radiation for an inspection
apparatus. The source generates at least first measurement radiation and second …
apparatus. The source generates at least first measurement radiation and second …
Illumination source for an inspection apparatus, inspection apparatus and inspection method
DO Dwyer, PW Smorenburg… - US Patent 10,642,172, 2020 - Google Patents
Abstract An illumination source apparatus (500), suitable for use in a metrology apparatus
for the characterization of a structure on a substrate, the illumination source apparatus …
for the characterization of a structure on a substrate, the illumination source apparatus …