Design of MEMS based three-axis motion stage by incorporating a nested structure
A new design of three degrees-of-freedom (DOF) translational motion stage (XYZ stage) is
presented in this paper. This XYZ stage is based on MEMS and designed by combining …
presented in this paper. This XYZ stage is based on MEMS and designed by combining …
A 3 degrees-of-freedom electrothermal micro-positioner for optical chip-to-chip alignment
This article proposes an electrothermal three-degrees-of-freedom (3-DOF) micro-positioner
equipped with a waveguide path, which can potentially be used for chip-to-chip alignment in …
equipped with a waveguide path, which can potentially be used for chip-to-chip alignment in …
MEMS positioners with silicon nitride waveguides for photonic integrated circuits alignment
AAS Rabih - 2024 - espace.etsmtl.ca
The integration of active chips such as lasers and semiconductor optical amplifiers into
silicon photonics is essential in photonic integrated circuits. Silicon as the main platform in …
silicon photonics is essential in photonic integrated circuits. Silicon as the main platform in …
Design of three degrees-of-freedom motion stage for micro manipulation
YS Kim - 2015 - search.proquest.com
A miniaturized translational motion stage has potentials to provide not only performances
equivalent to conventional motion stages, but also additional features from its small form …
equivalent to conventional motion stages, but also additional features from its small form …
Planning for Automated Optical Micromanipulation of Biological Cells
S Chowdhury - 2013 - search.proquest.com
Optical tweezers (OT) can be viewed as a robot that uses a highly focused laser beam for
precise manipulation of biological objects and dielectric beads at micro-scale. Using …
precise manipulation of biological objects and dielectric beads at micro-scale. Using …