MEMS-based pulse wave sensor utilizing a piezoresistive cantilever

TV Nguyen, Y Mizuki, T Tsukagoshi, T Takahata… - Sensors, 2020 - mdpi.com
This paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse
wave measurement. The sensor consists of an air chamber with a thin membrane and a 300 …

Wearable pulse wave monitoring system based on MEMS sensors

Y Sun, Y Dong, R Gao, Y Chu, M Zhang, X Qian… - Micromachines, 2018 - mdpi.com
Pulse wave monitoring is critical for the evaluation of human health. In this paper, a
wearable multi-sensor pulse wave monitoring system is proposed and demonstrated. The …

A packaging technique of pressure sensor for in vivo measurement system

K Zhao, H Zhuang, L Cui, J Ma, G Yan, D Han - Sensors and Actuators A …, 2022 - Elsevier
Bodily pressures can provide valuable information for making a diagnosis or health
monitoring. The pressure sensor is widely used to obtain bodily pressure, however, sensor …

Frequency characteristics of pulse wave sensor using MEMS piezoresistive cantilever element

T Nabeshima, TV Nguyen, H Takahashi - Micromachines, 2022 - mdpi.com
Wearable sensor devices with minimal discomfort to the wearer have been widely
developed to realize continuous measurements of vital signs (body temperature, blood …

The capacitive sensing of the pulsatile liquid flow—investigation on a physical vascular model

D Barvik, M Cerny, N Noury - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
This article investigates a prospective capacitive sensing method for the measurement of
physical characteristics of a pulsatile liquid flow. It was tested on a physical vascular model …

Elastic wave measurement using a MEMS AE sensor

T Omori, T Usui, K Watabe, MD Nguyen, K Matsumoto… - Applied Sciences, 2017 - mdpi.com
In recent years, with the continuing progress of aging social infrastructures such as bridges
and tunnels, there has been high demand for the assessment of deterioration of their …

Highly sensitive pulse wave sensor with a piezoresistive cantilever inside an air chamber

Y Mizuki, TV Nguyen, T Takahata… - 2019 IEEE 32nd …, 2019 - ieeexplore.ieee.org
This paper reports a sensor that can measure blood pulse waves with high sensitivity. The
sensor has a piezoresistive cantilever which is designed to measure the pressure change of …

A Piezoresistive Vibration Sensor with Liquid on Corrugated Membrane

R Suzuki, TV Nguyen, T Takahata… - 2019 IEEE 32nd …, 2019 - ieeexplore.ieee.org
This paper reports on a MEMS vibration sensor with a structure of liquid on a thin Parylene
membrane which has a piezoresistive beam attached underneath. The proposed sensor has …

Piezoelectric and Conductive Polymer Based Flexible Devices Enabling Cardiovascular Health Sensing and Energy Harvesting

A Closson - 2023 - search.proquest.com
Piezoelectric materials show great promise for low-power wearable and implantable
sensing, but their rigidity makes it challenging to integrate them with biological tissue. To …

MEMS sensor devices with a piezo-resistive cantilever

K Matsumoto, I Shimoyama - International Journal of Automation …, 2018 - jstage.jst.go.jp
We have engaged in researching and developing a large number of sensor devices using
piezo-resistive cantilevers. The important technical features of our sensor devices lie in their …