[HTML][HTML] Crystallinity Effect on Electrical Properties of PEALD–HfO2 Thin Films Prepared by Different Substrate Temperatures
Hafnium oxide (HfO2) thin film has remarkable physical and chemical properties, which
makes it useful for a variety of applications. In this work, HfO2 films were prepared on silicon …
makes it useful for a variety of applications. In this work, HfO2 films were prepared on silicon …
[HTML][HTML] Research progress on nanosecond laser irradiation damage of optical films
Y Wu, X Xiang, J Yu, X Yuan, H Shen, W Zheng, X Zu - Nuclear Analysis, 2022 - Elsevier
Nanosecond laser irradiation damage of optical films is one of the main factors to limit the
output power when the high power solid laser system is used to drive inertial confinement …
output power when the high power solid laser system is used to drive inertial confinement …
[HTML][HTML] High-Performance Graphene Nanowalls/Si Self-Powered Photodetectors with HfO2 as an Interfacial Layer
Y Shen, Y Li, W Chen, S Jiang, C Li, Q Cheng - Nanomaterials, 2023 - mdpi.com
Graphene/silicon (Si) heterojunction photodetectors are widely studied in detecting of optical
signals from near-infrared to visible light. However, the performance of graphene/Si …
signals from near-infrared to visible light. However, the performance of graphene/Si …
Impact of oxygen flow rate and annealing on the structural and optical properties of HfO2 thin films
AK Gupta, A Pathak, SK Pandey - 2023 IEEE Silchar …, 2023 - ieeexplore.ieee.org
This work presents an organized study of oxygen flow rate and annealing temperature
optimization for reactive RF magnetron sputtering-based HfO 2 thin film deposition. The …
optimization for reactive RF magnetron sputtering-based HfO 2 thin film deposition. The …
[引用][C] Crystallinity Effect on Electrical Properties of PEALD–HfO2 Thin Films Prepared by Different Substrate Temperatures. Nanomaterials 2022, 12, 3890
Hafnium oxide (HfO2) thin film has remarkable physical and chemical properties, which
makes it useful for a variety of applications. In this work, HfO2 films were prepared on silicon …
makes it useful for a variety of applications. In this work, HfO2 films were prepared on silicon …