Silica on silicon carbide

V Presser, KG Nickel - Critical reviews in solid state and materials …, 2008 - Taylor & Francis
Silicon carbide (SiC) as both the most important non-oxide ceramic and promising
semiconductor material grows stoichiometric SiO 2 as its native oxide. During passive …

The mechanism of defect creation and passivation at the SiC/SiO2 interface

P Deák, JM Knaup, T Hornos, C Thill… - Journal of Physics D …, 2007 - iopscience.iop.org
From the viewpoint of application in power electronics, SiC possesses the greatest
advantage of having SiO 2 as its native oxide. Unfortunately, the usual thermal oxidation …

Bonding at the Interface and the Effects of Nitrogen and Hydrogen

S Wang, S Dhar, S Wang, AC Ahyi, A Franceschetti… - Physical review …, 2007 - APS
Unlike the Si-SiO 2 interface, the SiC-SiO 2 interface has large defect densities. Though
nitridation has been shown to reduce the defect density, the effect of H remains an open …

Defects in as the possible origin of near interface traps in the system: A systematic theoretical study

JM Knaup, P Deák, T Frauenheim, A Gali, Z Hajnal… - Physical Review B …, 2005 - APS
A systematic study of the level positions of intrinsic and carbon defects in SiO 2 is presented,
based on density functional calculations with a hybrid functional in an α-quartz supercell …

Theoretical study of the mechanism of dry oxidation of -SiC

JM Knaup, P Deák, T Frauenheim, A Gali, Z Hajnal… - Physical Review B …, 2005 - APS
Possible defect structures, arising from the interaction of O 2 molecules with an ideal portion
of the SiC∕ Si O 2 interface, have been investigated systematically using density functional …

Structure and energetics of carbon defects in SiC (0001)/SiO2 systems at realistic temperatures: Defects in SiC, SiO2, and at their interface

T Kobayashi, Y Matsushita - Journal of Applied Physics, 2019 - pubs.aip.org
We report systematic first-principles calculations that reveal the atomic configurations,
stability, and energy levels of carbon defects in SiC (0001)/SiO 2 systems. We clarify the …

Charge transition levels of carbon-, oxygen-, and hydrogen-related defects at the SiC/SiO interface through hybrid functionals

F Devynck, A Alkauskas, P Broqvist… - Physical Review B …, 2011 - APS
We calculate charge transition levels of various defects at the SiC/SiO 2 interface within a
scheme based on hybrid density functionals, which accurately reproduce the involved band …

New method for growing silicon carbide on silicon by solid-phase epitaxy: Model and experiment

SA Kukushkin, AV Osipov - Physics of the Solid State, 2008 - Springer
A new method of solid-state epitaxy of silicon carbide (SiC) on silicon (Si) is proposed
theoretically and realized experimentally. Films of various polytypes of SiC on Si (111) grow …

Identification of the Carbon Dangling Bond Center at the Interface <?format ?>by an EPR Study in Oxidized Porous SiC

JL Cantin, HJ Von Bardeleben, Y Shishkin, Y Ke… - Physical review …, 2004 - APS
We report the observation of a paramagnetic interface defect in thermally oxidized porous n-
type doped 4 HS i C/S i O 2. Based on its axial symmetry and resolved hyperfine interactions …

Density-functional calculations of defect formation energies using supercell methods: Defects in diamond

J Shim, EK Lee, YJ Lee, RM Nieminen - Physical Review B—Condensed …, 2005 - APS
Density-functional theory combined with periodic boundary conditions is used to
systematically study the dependence of defect formation energy on supercell size for …