Nanomechanics has brought mesoscopic physics into the world of vibrations. Because
nanomechanical systems are small, fluctuations are significant, the vibrations already …

MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

Mechanical oscillators are present in almost every electronic device. They mainly consist of
a resonating element providing an oscillating output with a specific frequency. Their ability to …

The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …

Pressure sensors play a vital role in aerospace, automotive, medical, and consumer
electronics. Although microelectromechanical system (MEMS)-based pressure sensors have …

Nano-and micro-electromechanical systems (N/MEMSs) are traditionally based on
electrostatic or piezoelectric coupling, which couples electrical and mechanical energy …

We present a new temperature compensation system for microresonator-based frequency
references. It consists of a phase-locked loop (PLL) whose inputs are derived from two …

Resonators fabricated in heavily doped silicon have been noted to have a reduced
frequency-temperature dependence compared with lightly doped silicon. The resonant …

Utilizing silicon and silicon dioxide's opposing temperature coefficients of Young's modulus,
composite resonators with zero linear temperature coefficient of frequency are fabricated …

In this paper, we present four design methods to overcome (100) silicon crystalline
anisotropy and achieve mode-matching in wineglass-mode disk resonator gyroscope …