Recent advances in sequential infiltration synthesis (Sis) of block copolymers (bcps)
In the continuous downscaling of device features, the microelectronics industry is facing the
intrinsic limits of conventional lithographic techniques. The development of new synthetic …
intrinsic limits of conventional lithographic techniques. The development of new synthetic …
Poly (vinylpyridine) segments in block copolymers: Synthesis, self-assembly, and versatility
JG Kennemur - Macromolecules, 2019 - ACS Publications
This Perspective provides a current survey on the synthesis, self-assembly, and vast variety
of applications possible from block copolymer (BCP) systems containing at least one …
of applications possible from block copolymer (BCP) systems containing at least one …
Using block copolymers as infiltration sites for development of future nanoelectronic devices: Achievements, barriers, and opportunities
Creating inorganic nanostructures for development of nanoelectronic device components is
a highly active research area. The ability for manipulation of the chemistry of materials, as …
a highly active research area. The ability for manipulation of the chemistry of materials, as …
The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective
Sequential infiltration synthesis (SIS) is an emerging materials growth method by which
inorganic metal oxides are nucleated and grown within the free volume of polymers in …
inorganic metal oxides are nucleated and grown within the free volume of polymers in …
Preserving nanoscale features in polymers during laser induced graphene formation using sequential infiltration synthesis
Direct lasing of polymeric membranes to form laser induced graphene (LIG) offers a scalable
and potentially cheaper alternative for the fabrication of electrically conductive membranes …
and potentially cheaper alternative for the fabrication of electrically conductive membranes …
Directed self-assembly of block copolymers for sub-10 nm fabrication
Y Chen, S Xiong - International Journal of Extreme Manufacturing, 2020 - iopscience.iop.org
Directed self-assembly (DSA) emerges as one of the most promising new patterning
techniques for single digit miniaturization and next generation lithography. DSA achieves …
techniques for single digit miniaturization and next generation lithography. DSA achieves …
Sequential infiltration synthesis of electronic materials: group 13 oxides via metal alkyl precursors
The sequential infiltration synthesis (SIS) of group 13 indium and gallium oxides (In2O3 and
Ga2O3) into poly (methyl methacrylate)(PMMA) thin films is demonstrated using …
Ga2O3) into poly (methyl methacrylate)(PMMA) thin films is demonstrated using …
Reaction–diffusion transport model to predict precursor uptake and spatial distribution in vapor-phase infiltration processes
Vapor-phase infiltration (VPI) has emerged as a scalable process for transforming polymer
products into a variety of organic–inorganic hybrid materials with potential applications to a …
products into a variety of organic–inorganic hybrid materials with potential applications to a …
The development and atomic structure of zinc oxide crystals grown within polymers from vapor phase precursors
I Weisbord, M Barzilay, R Cai, E Welter, A Kuzmin… - ACS …, 2024 - ACS Publications
Sequential infiltration synthesis (SIS), also known as vapor phase infiltration (VPI), is a
quickly expanding technique that allows growth of inorganic materials within polymers from …
quickly expanding technique that allows growth of inorganic materials within polymers from …
Infiltration synthesis of diverse metal oxide nanostructures from epoxidized diene–styrene block copolymer templates
Infiltration synthesis is a class of block copolymer lithography in which block copolymer
templates are selectively infiltrated with metal or metal oxide precursors, which has been …
templates are selectively infiltrated with metal or metal oxide precursors, which has been …