The constant development and miniaturization of MEMS sensors invariably provides new
possibilities for their use in health-related and medical applications. The application of …

In many applications it is crucial to design reliable and efficient analog readout circuits for
micro-electromechanical (MEMS) capacitive sensors. In this paper, we describe the …

The paper presents the noise analysis of a MEMS and ASIC readout integrated circuit
(ROIC) constituting the accelerometer developed in the frame of the InnoReh project, aiming …

The constant development and miniaturization of MEMS sensors invariably provides new
possibilities for their use in health-related and medical applications. The application of …

After the manufacturing process of a differential capacitive MEMS sensor, a capacitance
mismatch may occur, which may result in the unwanted offset in the output voltage. In this …

In this paper we present the main concept of an electronic device, destined to work as a part
of a system devoted to monitoring human gait and movement in daily life. Operation of the …

One of the most crucial step in designing of MEMS devices is modelling. It allows estimating
the performance of a device without its fabrication and it provides fast optimization process …

In this paper we present the design methodology of Z-axis accelerometer that will be
fabricated using surface micromachining process. Such technology have some restrictions …

During the design of acceleration measuring system, the optimal choice of sensor
parameters may only be made by careful analysis of both the MEMS sensor itself and the …

The presented work provides results and discusses implications for introductory comparison
of test results of temperature dependence of the integrated semiconductor system designed …