Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

In semiconductor manufacturing, there are wafer fabrication processes with wafer revisiting.
Some of them must meet wafer residency time constraints. Taking atomic layer deposition …

In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …

Scheduling of a robotic flow shop, where a dual-gripper robot transports parts between
machines, is addressed with a makespan measure. Most previous studies on robotic flow …

Cluster tools, each of which consists of multiple processing modules, one material handling
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …

Scheduling of robots is one of the imperative assignment in a multi robot system. Scheduling
is prerequisite when there is a multiple task need to be assigned to multi robot in an …

A robotic cluster tool involves many activities whose time is subject to some disturbance,
thus leading to the activity time variation. It results in wafer sojourn time fluctuation in a …

Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …

In its fabrication, a wafer must meet its residency time constraints, ie, it must leave its process
chamber within a certain time after its process is done. It may need to visit some processing …

Due to the trends of larger wafer diameters and smaller lot sizes, cluster tools need to switch
from processing one lot of wafers to another frequently. This leads to more transient periods …